JPH0526983Y2 - - Google Patents

Info

Publication number
JPH0526983Y2
JPH0526983Y2 JP1986153560U JP15356086U JPH0526983Y2 JP H0526983 Y2 JPH0526983 Y2 JP H0526983Y2 JP 1986153560 U JP1986153560 U JP 1986153560U JP 15356086 U JP15356086 U JP 15356086U JP H0526983 Y2 JPH0526983 Y2 JP H0526983Y2
Authority
JP
Japan
Prior art keywords
sensor chip
pressure
semiconductor
sensor
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986153560U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6358731U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986153560U priority Critical patent/JPH0526983Y2/ja
Publication of JPS6358731U publication Critical patent/JPS6358731U/ja
Application granted granted Critical
Publication of JPH0526983Y2 publication Critical patent/JPH0526983Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1986153560U 1986-10-06 1986-10-06 Expired - Lifetime JPH0526983Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986153560U JPH0526983Y2 (enrdf_load_stackoverflow) 1986-10-06 1986-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986153560U JPH0526983Y2 (enrdf_load_stackoverflow) 1986-10-06 1986-10-06

Publications (2)

Publication Number Publication Date
JPS6358731U JPS6358731U (enrdf_load_stackoverflow) 1988-04-19
JPH0526983Y2 true JPH0526983Y2 (enrdf_load_stackoverflow) 1993-07-08

Family

ID=31072557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986153560U Expired - Lifetime JPH0526983Y2 (enrdf_load_stackoverflow) 1986-10-06 1986-10-06

Country Status (1)

Country Link
JP (1) JPH0526983Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001011329A1 (fr) * 1999-08-05 2001-02-15 Fujikin Incorporated Structure de montage de detecteur de pression

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7021152B2 (en) * 2003-07-18 2006-04-04 Radi Medical Systems Ab Sensor and guide wire assembly
JP2004045424A (ja) * 2003-09-22 2004-02-12 Tadahiro Omi 圧力検出器の取付け構造
JP4840098B2 (ja) 2006-11-20 2011-12-21 トヨタ自動車株式会社 圧力センサ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52141594A (en) * 1977-01-31 1977-11-25 Hitachi Ltd Semiconductor type pressure transmittor
JPS53109483U (enrdf_load_stackoverflow) * 1977-02-08 1978-09-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001011329A1 (fr) * 1999-08-05 2001-02-15 Fujikin Incorporated Structure de montage de detecteur de pression

Also Published As

Publication number Publication date
JPS6358731U (enrdf_load_stackoverflow) 1988-04-19

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