JPH0648832Y2 - プラズマ処理装置 - Google Patents
プラズマ処理装置Info
- Publication number
- JPH0648832Y2 JPH0648832Y2 JP1988105702U JP10570288U JPH0648832Y2 JP H0648832 Y2 JPH0648832 Y2 JP H0648832Y2 JP 1988105702 U JP1988105702 U JP 1988105702U JP 10570288 U JP10570288 U JP 10570288U JP H0648832 Y2 JPH0648832 Y2 JP H0648832Y2
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic coil
- case
- generation chamber
- plasma generation
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 claims description 18
- 239000003302 ferromagnetic material Substances 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 2
- 239000002826 coolant Substances 0.000 description 7
- 230000004907 flux Effects 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988105702U JPH0648832Y2 (ja) | 1988-08-09 | 1988-08-09 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988105702U JPH0648832Y2 (ja) | 1988-08-09 | 1988-08-09 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227726U JPH0227726U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-02-22 |
| JPH0648832Y2 true JPH0648832Y2 (ja) | 1994-12-12 |
Family
ID=31338555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988105702U Expired - Lifetime JPH0648832Y2 (ja) | 1988-08-09 | 1988-08-09 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648832Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0666296B2 (ja) * | 1985-09-20 | 1994-08-24 | 株式会社日立製作所 | プラズマ処理装置 |
| JPS62197847U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-06-06 | 1987-12-16 |
-
1988
- 1988-08-09 JP JP1988105702U patent/JPH0648832Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0227726U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-02-22 |