JPH0648685Y2 - 霧化薄膜形成装置 - Google Patents
霧化薄膜形成装置Info
- Publication number
- JPH0648685Y2 JPH0648685Y2 JP7816089U JP7816089U JPH0648685Y2 JP H0648685 Y2 JPH0648685 Y2 JP H0648685Y2 JP 7816089 U JP7816089 U JP 7816089U JP 7816089 U JP7816089 U JP 7816089U JP H0648685 Y2 JPH0648685 Y2 JP H0648685Y2
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- substrate
- film
- nozzle
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 21
- 238000000889 atomisation Methods 0.000 title 1
- 239000010408 film Substances 0.000 claims description 104
- 239000000758 substrate Substances 0.000 claims description 52
- 239000002994 raw material Substances 0.000 claims description 15
- 239000003595 mist Substances 0.000 claims description 14
- 238000005192 partition Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 description 20
- 239000000243 solution Substances 0.000 description 13
- 239000011521 glass Substances 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910017855 NH 4 F Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Liquid Crystal (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7816089U JPH0648685Y2 (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7816089U JPH0648685Y2 (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0316613U JPH0316613U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-19 |
| JPH0648685Y2 true JPH0648685Y2 (ja) | 1994-12-12 |
Family
ID=31621184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7816089U Expired - Lifetime JPH0648685Y2 (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648685Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09209131A (ja) * | 1996-02-08 | 1997-08-12 | Ricoh Co Ltd | 薄膜形成装置 |
| JPH09228046A (ja) * | 1996-02-23 | 1997-09-02 | Ricoh Co Ltd | 巻き取り式成膜装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4576370B2 (ja) * | 2006-10-20 | 2010-11-04 | 三菱重工業株式会社 | 蒸着装置及び蒸着方法 |
-
1989
- 1989-06-30 JP JP7816089U patent/JPH0648685Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09209131A (ja) * | 1996-02-08 | 1997-08-12 | Ricoh Co Ltd | 薄膜形成装置 |
| JPH09228046A (ja) * | 1996-02-23 | 1997-09-02 | Ricoh Co Ltd | 巻き取り式成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316613U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1983003245A1 (en) | Glass coating hood | |
| JPH0648685Y2 (ja) | 霧化薄膜形成装置 | |
| EP0415253B1 (en) | Thin film forming apparatus | |
| KR910005052B1 (ko) | 기판 피막 형성장치 | |
| US3684469A (en) | Method of coating glassware | |
| JPH07100864B2 (ja) | 霧化薄膜形成装置 | |
| JPH0461076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPH0247541B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPH0745846Y2 (ja) | 霧化薄膜形成装置 | |
| JPH0461075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| US5086727A (en) | Thin film forming apparatus having adjustable guide | |
| JP2588076Y2 (ja) | 薄膜形成装置 | |
| JPH0778768A (ja) | 薄膜形成装置及び方法 | |
| JPH0247540B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JP2588075Y2 (ja) | 薄膜形成装置 | |
| JPH0336280A (ja) | 薄膜形成装置 | |
| JPH0698330B2 (ja) | 霧化薄膜形成装置 | |
| JPS613885A (ja) | 霧化薄膜作製方法 | |
| JPH05320919A (ja) | 霧化薄膜形成用霧供給装置 | |
| JPH0520505B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPH05214541A (ja) | 薄膜形成装置 | |
| JPH0670232U (ja) | 薄膜形成装置 | |
| JPH0336276A (ja) | 霧化薄膜形成装置 | |
| JPH0520506B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPH03247773A (ja) | 薄膜形成装置 |