JPH0648421Y2 - 半導体加速度センサ - Google Patents
半導体加速度センサInfo
- Publication number
- JPH0648421Y2 JPH0648421Y2 JP1987105794U JP10579487U JPH0648421Y2 JP H0648421 Y2 JPH0648421 Y2 JP H0648421Y2 JP 1987105794 U JP1987105794 U JP 1987105794U JP 10579487 U JP10579487 U JP 10579487U JP H0648421 Y2 JPH0648421 Y2 JP H0648421Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoresistors
- semiconductor substrate
- pair
- substrate body
- conductivity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987105794U JPH0648421Y2 (ja) | 1987-07-08 | 1987-07-08 | 半導体加速度センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987105794U JPH0648421Y2 (ja) | 1987-07-08 | 1987-07-08 | 半導体加速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6410664U JPS6410664U (US08063081-20111122-C00115.png) | 1989-01-20 |
JPH0648421Y2 true JPH0648421Y2 (ja) | 1994-12-12 |
Family
ID=31338728
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987105794U Expired - Lifetime JPH0648421Y2 (ja) | 1987-07-08 | 1987-07-08 | 半導体加速度センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648421Y2 (US08063081-20111122-C00115.png) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2715738B2 (ja) * | 1991-09-30 | 1998-02-18 | 日産自動車株式会社 | 半導体応力検出装置 |
JP2737479B2 (ja) * | 1991-09-30 | 1998-04-08 | 日産自動車株式会社 | 半導体応力検出装置 |
JP2001304997A (ja) * | 2000-04-27 | 2001-10-31 | Toyota Central Res & Dev Lab Inc | 半導体圧力センサ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60113157A (ja) * | 1983-10-28 | 1985-06-19 | ハネウエル・インコーポレーテッド | 加速度計 |
JPS61139758A (ja) * | 1984-12-12 | 1986-06-27 | Nissan Motor Co Ltd | 半導体加速度センサ |
-
1987
- 1987-07-08 JP JP1987105794U patent/JPH0648421Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60113157A (ja) * | 1983-10-28 | 1985-06-19 | ハネウエル・インコーポレーテッド | 加速度計 |
JPS61139758A (ja) * | 1984-12-12 | 1986-06-27 | Nissan Motor Co Ltd | 半導体加速度センサ |
Also Published As
Publication number | Publication date |
---|---|
JPS6410664U (US08063081-20111122-C00115.png) | 1989-01-20 |
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