JPH0645678Y2 - 多段真空エゼクタ−ポンプの消音装置 - Google Patents
多段真空エゼクタ−ポンプの消音装置Info
- Publication number
- JPH0645678Y2 JPH0645678Y2 JP1986138556U JP13855686U JPH0645678Y2 JP H0645678 Y2 JPH0645678 Y2 JP H0645678Y2 JP 1986138556 U JP1986138556 U JP 1986138556U JP 13855686 U JP13855686 U JP 13855686U JP H0645678 Y2 JPH0645678 Y2 JP H0645678Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- nozzle
- final
- stage nozzle
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003584 silencer Effects 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
Landscapes
- Jet Pumps And Other Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986138556U JPH0645678Y2 (ja) | 1986-09-11 | 1986-09-11 | 多段真空エゼクタ−ポンプの消音装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986138556U JPH0645678Y2 (ja) | 1986-09-11 | 1986-09-11 | 多段真空エゼクタ−ポンプの消音装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6345097U JPS6345097U (OSRAM) | 1988-03-26 |
| JPH0645678Y2 true JPH0645678Y2 (ja) | 1994-11-24 |
Family
ID=31043650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986138556U Expired - Lifetime JPH0645678Y2 (ja) | 1986-09-11 | 1986-09-11 | 多段真空エゼクタ−ポンプの消音装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645678Y2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006132474A (ja) * | 2004-11-08 | 2006-05-25 | Ckd Corp | エゼクタ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE370765B (OSRAM) * | 1973-12-05 | 1974-10-28 | Piab Ab |
-
1986
- 1986-09-11 JP JP1986138556U patent/JPH0645678Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6345097U (OSRAM) | 1988-03-26 |
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