JPH0644912Y2 - 板状材料搬送装置 - Google Patents
板状材料搬送装置Info
- Publication number
- JPH0644912Y2 JPH0644912Y2 JP1986152214U JP15221486U JPH0644912Y2 JP H0644912 Y2 JPH0644912 Y2 JP H0644912Y2 JP 1986152214 U JP1986152214 U JP 1986152214U JP 15221486 U JP15221486 U JP 15221486U JP H0644912 Y2 JPH0644912 Y2 JP H0644912Y2
- Authority
- JP
- Japan
- Prior art keywords
- holder
- cassette
- gripping
- material holder
- lifting member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 title claims description 145
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 238000003860 storage Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 4
- 238000005192 partition Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
Landscapes
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986152214U JPH0644912Y2 (ja) | 1986-10-02 | 1986-10-02 | 板状材料搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986152214U JPH0644912Y2 (ja) | 1986-10-02 | 1986-10-02 | 板状材料搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6359137U JPS6359137U (enrdf_load_stackoverflow) | 1988-04-20 |
| JPH0644912Y2 true JPH0644912Y2 (ja) | 1994-11-16 |
Family
ID=31069993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986152214U Expired - Lifetime JPH0644912Y2 (ja) | 1986-10-02 | 1986-10-02 | 板状材料搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644912Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50125462A (enrdf_load_stackoverflow) * | 1974-03-20 | 1975-10-02 | ||
| JPS6058632A (ja) * | 1983-09-12 | 1985-04-04 | Seiko Epson Corp | 移送方法 |
-
1986
- 1986-10-02 JP JP1986152214U patent/JPH0644912Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6359137U (enrdf_load_stackoverflow) | 1988-04-20 |
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