JPH0644091Y2 - レジスト膜形成装置のウェーハ搬送機構 - Google Patents

レジスト膜形成装置のウェーハ搬送機構

Info

Publication number
JPH0644091Y2
JPH0644091Y2 JP1203689U JP1203689U JPH0644091Y2 JP H0644091 Y2 JPH0644091 Y2 JP H0644091Y2 JP 1203689 U JP1203689 U JP 1203689U JP 1203689 U JP1203689 U JP 1203689U JP H0644091 Y2 JPH0644091 Y2 JP H0644091Y2
Authority
JP
Japan
Prior art keywords
wafer
rail
resist
transfer mechanism
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1203689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02102721U (enExample
Inventor
正彦 田中
剛史 佐藤
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP1203689U priority Critical patent/JPH0644091Y2/ja
Publication of JPH02102721U publication Critical patent/JPH02102721U/ja
Application granted granted Critical
Publication of JPH0644091Y2 publication Critical patent/JPH0644091Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1203689U 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構 Expired - Lifetime JPH0644091Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1203689U JPH0644091Y2 (ja) 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1203689U JPH0644091Y2 (ja) 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構

Publications (2)

Publication Number Publication Date
JPH02102721U JPH02102721U (enExample) 1990-08-15
JPH0644091Y2 true JPH0644091Y2 (ja) 1994-11-14

Family

ID=31221118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1203689U Expired - Lifetime JPH0644091Y2 (ja) 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構

Country Status (1)

Country Link
JP (1) JPH0644091Y2 (enExample)

Also Published As

Publication number Publication date
JPH02102721U (enExample) 1990-08-15

Similar Documents

Publication Publication Date Title
US4907701A (en) Apparatus for inspecting the appearance of semiconductor devices
US4178097A (en) Automatic lithographic plate processor
US4731977A (en) Robot system for encasing conical articles
JP3114692B2 (ja) 被処理物取扱方法及び被処理物取扱装置
JPS63296219A (ja) ウエハー製造におけるレテイクル高速交換方法及びその装置
JPS63300015A (ja) 印刷回路基板の取扱装置
JPH0644091Y2 (ja) レジスト膜形成装置のウェーハ搬送機構
US3587524A (en) Coating apparatus including conveyer-mask
JP3049981B2 (ja) チップ部品の電極形成システム
JPS635523A (ja) レジスト材の塗布現像装置
US3667989A (en) Method for selectively coating articles
JPS632142B2 (enExample)
JP2002127064A (ja) 電子部品用自動ハンドリング装置
US5724788A (en) Foundry core assembling apparatus
JPH0448856Y2 (enExample)
JPS6139248B2 (enExample)
JPS6138225Y2 (enExample)
JPH01316147A (ja) ワーク搬送装置
KR100625087B1 (ko) 다단계 자동 스핀코팅 시스템
JPS6176180A (ja) パチンコ機盤面の搬送方法およびその装置
JPH0625305Y2 (ja) 融雪瓦製造システムにおける瓦移載装置
JP2577704Y2 (ja) 工業用ロボットのワ−ク保持装置
JP2738474B2 (ja) 自動焼付方法およびシステム
JPH0526754Y2 (enExample)
JP2701379B2 (ja) フープ材料搬送装置