JPH02102721U - - Google Patents
Info
- Publication number
- JPH02102721U JPH02102721U JP1203689U JP1203689U JPH02102721U JP H02102721 U JPH02102721 U JP H02102721U JP 1203689 U JP1203689 U JP 1203689U JP 1203689 U JP1203689 U JP 1203689U JP H02102721 U JPH02102721 U JP H02102721U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- stage
- rails
- predetermined length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1203689U JPH0644091Y2 (ja) | 1989-02-02 | 1989-02-02 | レジスト膜形成装置のウェーハ搬送機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1203689U JPH0644091Y2 (ja) | 1989-02-02 | 1989-02-02 | レジスト膜形成装置のウェーハ搬送機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02102721U true JPH02102721U (enExample) | 1990-08-15 |
| JPH0644091Y2 JPH0644091Y2 (ja) | 1994-11-14 |
Family
ID=31221118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1203689U Expired - Lifetime JPH0644091Y2 (ja) | 1989-02-02 | 1989-02-02 | レジスト膜形成装置のウェーハ搬送機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644091Y2 (enExample) |
-
1989
- 1989-02-02 JP JP1203689U patent/JPH0644091Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644091Y2 (ja) | 1994-11-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH02102721U (enExample) | ||
| JPS58175941U (ja) | サ−マルヘツド | |
| JPS58165152U (ja) | 建設足場用ブラケツト | |
| JPS6165056U (enExample) | ||
| JPH0183468U (enExample) | ||
| JPS58176831U (ja) | 紙葉類の払出装置 | |
| JPH0237129U (enExample) | ||
| JPS5873287U (ja) | 自動麻雀卓用の整列牌押出し機構 | |
| JPS59129554U (ja) | 転写箔 | |
| JPS5950920U (ja) | 長尺部材の移送装置における長尺部材の姿勢調節装置 | |
| JPH0315162U (enExample) | ||
| JPS5812506U (ja) | パネル搬送装置 | |
| JPS59142226U (ja) | 物品の移載装置 | |
| JPH0379862U (enExample) | ||
| JPS58185468U (ja) | 感熱記録ロ−ル紙 | |
| JPS581006U (ja) | パネル搬送装置 | |
| JPS5878088U (ja) | 蒸し菓子用下敷紙 | |
| JPH0266508U (enExample) | ||
| JPS58144549U (ja) | シ−ト巻軸 | |
| JPS6287499U (enExample) | ||
| JPS60195823U (ja) | 搬送ロ−ラ装置 | |
| JPS637400U (enExample) | ||
| JPH0318029U (enExample) | ||
| JPS6254986U (enExample) | ||
| JPS61178957U (enExample) |