JPH0644008Y2 - ガスフェーズ型集束イオンビーム装置 - Google Patents

ガスフェーズ型集束イオンビーム装置

Info

Publication number
JPH0644008Y2
JPH0644008Y2 JP4612589U JP4612589U JPH0644008Y2 JP H0644008 Y2 JPH0644008 Y2 JP H0644008Y2 JP 4612589 U JP4612589 U JP 4612589U JP 4612589 U JP4612589 U JP 4612589U JP H0644008 Y2 JPH0644008 Y2 JP H0644008Y2
Authority
JP
Japan
Prior art keywords
electrode
ion beam
emitter
gas phase
focused ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4612589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02137747U (cs
Inventor
守一 小西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP4612589U priority Critical patent/JPH0644008Y2/ja
Publication of JPH02137747U publication Critical patent/JPH02137747U/ja
Application granted granted Critical
Publication of JPH0644008Y2 publication Critical patent/JPH0644008Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP4612589U 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置 Expired - Fee Related JPH0644008Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4612589U JPH0644008Y2 (ja) 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4612589U JPH0644008Y2 (ja) 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置

Publications (2)

Publication Number Publication Date
JPH02137747U JPH02137747U (cs) 1990-11-16
JPH0644008Y2 true JPH0644008Y2 (ja) 1994-11-14

Family

ID=31560927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4612589U Expired - Fee Related JPH0644008Y2 (ja) 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置

Country Status (1)

Country Link
JP (1) JPH0644008Y2 (cs)

Also Published As

Publication number Publication date
JPH02137747U (cs) 1990-11-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees