JPH0643518Y2 - 分子ポンプのシール装置 - Google Patents
分子ポンプのシール装置Info
- Publication number
- JPH0643518Y2 JPH0643518Y2 JP6686188U JP6686188U JPH0643518Y2 JP H0643518 Y2 JPH0643518 Y2 JP H0643518Y2 JP 6686188 U JP6686188 U JP 6686188U JP 6686188 U JP6686188 U JP 6686188U JP H0643518 Y2 JPH0643518 Y2 JP H0643518Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- molecular pump
- sealing device
- thread groove
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6686188U JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6686188U JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01173493U JPH01173493U (US20020167097A1-20021114-C00005.png) | 1989-12-08 |
JPH0643518Y2 true JPH0643518Y2 (ja) | 1994-11-14 |
Family
ID=31292249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6686188U Expired - Lifetime JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0643518Y2 (US20020167097A1-20021114-C00005.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202013002969U1 (de) * | 2013-03-27 | 2014-06-30 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
-
1988
- 1988-05-23 JP JP6686188U patent/JPH0643518Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01173493U (US20020167097A1-20021114-C00005.png) | 1989-12-08 |
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