JPH064301Y2 - 半導体圧力センサ - Google Patents
半導体圧力センサInfo
- Publication number
- JPH064301Y2 JPH064301Y2 JP1987122671U JP12267187U JPH064301Y2 JP H064301 Y2 JPH064301 Y2 JP H064301Y2 JP 1987122671 U JP1987122671 U JP 1987122671U JP 12267187 U JP12267187 U JP 12267187U JP H064301 Y2 JPH064301 Y2 JP H064301Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- semiconductor substrate
- semiconductor
- thermal expansion
- glass layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987122671U JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987122671U JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6427635U JPS6427635U (US20100223739A1-20100909-C00025.png) | 1989-02-17 |
JPH064301Y2 true JPH064301Y2 (ja) | 1994-02-02 |
Family
ID=31370817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987122671U Expired - Lifetime JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH064301Y2 (US20100223739A1-20100909-C00025.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015007626A (ja) * | 2013-06-19 | 2015-01-15 | ハネウェル・インターナショナル・インコーポレーテッド | シリコン応力隔離部材を有する統合soi圧力センサ |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7476695B2 (en) | 2004-03-16 | 2009-01-13 | Nissan Chemical Industries, Ltd. | Modified stannic oxide-zirconium oxide complex sol and method for preparing same |
JP4683618B2 (ja) * | 2005-02-10 | 2011-05-18 | キヤノンアネルバ株式会社 | 隔膜型圧力センサ及びその製造方法 |
US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5441304B2 (US20100223739A1-20100909-C00025.png) * | 1974-01-25 | 1979-12-07 | ||
JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
JPS57171235A (en) * | 1981-04-15 | 1982-10-21 | Toshiba Corp | Semiconductor pressure converter |
-
1987
- 1987-08-11 JP JP1987122671U patent/JPH064301Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015007626A (ja) * | 2013-06-19 | 2015-01-15 | ハネウェル・インターナショナル・インコーポレーテッド | シリコン応力隔離部材を有する統合soi圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
JPS6427635U (US20100223739A1-20100909-C00025.png) | 1989-02-17 |
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