JPH0640955Y2 - 磁気軸受型ターボ分子ポンプ - Google Patents
磁気軸受型ターボ分子ポンプInfo
- Publication number
- JPH0640955Y2 JPH0640955Y2 JP13975088U JP13975088U JPH0640955Y2 JP H0640955 Y2 JPH0640955 Y2 JP H0640955Y2 JP 13975088 U JP13975088 U JP 13975088U JP 13975088 U JP13975088 U JP 13975088U JP H0640955 Y2 JPH0640955 Y2 JP H0640955Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- molecular pump
- magnetic bearing
- blade
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13975088U JPH0640955Y2 (ja) | 1988-10-26 | 1988-10-26 | 磁気軸受型ターボ分子ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13975088U JPH0640955Y2 (ja) | 1988-10-26 | 1988-10-26 | 磁気軸受型ターボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0261198U JPH0261198U (US07498051-20090303-C00003.png) | 1990-05-07 |
JPH0640955Y2 true JPH0640955Y2 (ja) | 1994-10-26 |
Family
ID=31403301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13975088U Expired - Lifetime JPH0640955Y2 (ja) | 1988-10-26 | 1988-10-26 | 磁気軸受型ターボ分子ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0640955Y2 (US07498051-20090303-C00003.png) |
-
1988
- 1988-10-26 JP JP13975088U patent/JPH0640955Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0261198U (US07498051-20090303-C00003.png) | 1990-05-07 |
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