JPH0640954Y2 - ねじ溝真空ポンプ - Google Patents

ねじ溝真空ポンプ

Info

Publication number
JPH0640954Y2
JPH0640954Y2 JP764788U JP764788U JPH0640954Y2 JP H0640954 Y2 JPH0640954 Y2 JP H0640954Y2 JP 764788 U JP764788 U JP 764788U JP 764788 U JP764788 U JP 764788U JP H0640954 Y2 JPH0640954 Y2 JP H0640954Y2
Authority
JP
Japan
Prior art keywords
stator
vacuum pump
rotor
housing
thread groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP764788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01113191U (cs
Inventor
充 桜井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Vacuum Ltd
Original Assignee
Osaka Vacuum Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Vacuum Ltd filed Critical Osaka Vacuum Ltd
Priority to JP764788U priority Critical patent/JPH0640954Y2/ja
Publication of JPH01113191U publication Critical patent/JPH01113191U/ja
Application granted granted Critical
Publication of JPH0640954Y2 publication Critical patent/JPH0640954Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP764788U 1988-01-26 1988-01-26 ねじ溝真空ポンプ Expired - Lifetime JPH0640954Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP764788U JPH0640954Y2 (ja) 1988-01-26 1988-01-26 ねじ溝真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP764788U JPH0640954Y2 (ja) 1988-01-26 1988-01-26 ねじ溝真空ポンプ

Publications (2)

Publication Number Publication Date
JPH01113191U JPH01113191U (cs) 1989-07-31
JPH0640954Y2 true JPH0640954Y2 (ja) 1994-10-26

Family

ID=31212835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP764788U Expired - Lifetime JPH0640954Y2 (ja) 1988-01-26 1988-01-26 ねじ溝真空ポンプ

Country Status (1)

Country Link
JP (1) JPH0640954Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP2006170217A (ja) * 1997-06-27 2006-06-29 Ebara Corp ターボ分子ポンプ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022062902A (ja) * 2020-10-09 2022-04-21 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP2006170217A (ja) * 1997-06-27 2006-06-29 Ebara Corp ターボ分子ポンプ

Also Published As

Publication number Publication date
JPH01113191U (cs) 1989-07-31

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