JPH0639869Y2 - 真空チャック - Google Patents
真空チャックInfo
- Publication number
- JPH0639869Y2 JPH0639869Y2 JP1988052194U JP5219488U JPH0639869Y2 JP H0639869 Y2 JPH0639869 Y2 JP H0639869Y2 JP 1988052194 U JP1988052194 U JP 1988052194U JP 5219488 U JP5219488 U JP 5219488U JP H0639869 Y2 JPH0639869 Y2 JP H0639869Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- plate
- base
- check
- outer edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988052194U JPH0639869Y2 (ja) | 1988-04-20 | 1988-04-20 | 真空チャック |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988052194U JPH0639869Y2 (ja) | 1988-04-20 | 1988-04-20 | 真空チャック |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01156832U JPH01156832U (fi) | 1989-10-27 |
JPH0639869Y2 true JPH0639869Y2 (ja) | 1994-10-19 |
Family
ID=31278201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988052194U Expired - Lifetime JPH0639869Y2 (ja) | 1988-04-20 | 1988-04-20 | 真空チャック |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0639869Y2 (fi) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5630059B2 (ja) * | 2010-04-01 | 2014-11-26 | 株式会社Ihi | 真空吸着ステージ |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694238U (fi) * | 1979-12-18 | 1981-07-27 |
-
1988
- 1988-04-20 JP JP1988052194U patent/JPH0639869Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01156832U (fi) | 1989-10-27 |
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