JPH0639348Y2 - Grasping and conveying device for inspection of integrated circuits - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to an integrated circuit in which a plurality of external terminals for a semiconductor chip packaged in a synthetic resin mold portion are projected from a side surface of the mold portion. The present invention relates to a device for gripping and carrying in performance inspection.

[Conventional technology]

In general, an integrated circuit is shipped after inspecting whether or not it has a predetermined performance after manufacturing, and this performance inspection includes a socket main body into and out of the integrated circuit, and an upper surface of the socket main body. A test socket composed of a lid body that is pivotally attached to the open / close state is used, the integrated circuit is loaded into the socket body of the test socket, and then the lid body is closed, thereby Each external terminal is brought into contact with each contact terminal embedded in the socket body, and in this state, power is supplied to any external terminal in the integrated circuit, and it is measured whether or not a predetermined output is obtained from the other external terminal. I try to do it by doing.

Further, in the above inspection, loading and unloading of the integrated circuit into the socket body of the inspection socket is performed by a gripping and conveying device provided with a collet for grasping a mold portion of the integrated circuit. When the integrated circuit is loaded by the gripping transfer device, the integrated circuit gripped by the collet in the gripping transfer device is moved right above the socket main body in the inspection socket, and integrated in the socket main body. After accurately aligning with the loading part of the circuit, it must descend towards the socket body,
It was very inefficient because it took a long time to adjust the precise alignment of the socket body with respect to the loading portion of the integrated circuit.

Therefore, recently, the socket body of the inspection socket is provided with a guide portion that contacts the mold portion or the external terminal of the integrated circuit to guide the integrated circuit to a predetermined loading position, and the guiding and conveying device is used to integrate the integrated circuit. During the descent of the circuit, the integrated circuit is released from the grip and the integrated circuit is allowed to fall freely so that the guiding section guides the integrated circuit to a predetermined loading position. According to the method, it is not necessary to perform the alignment very strictly, and the time required for the alignment adjustment can be shortened, so that the efficiency can be improved.

[Problems to be solved by the device]

However, since this conventional method guides the integrated circuit to a predetermined loading position by each guide piece during the free fall, the integrated circuit is guided by the guide portion while the free fall occurs. Since the phenomenon of tilting due to being caught in the middle of the part is likely to occur, closing the lid body in this tilted state deforms each external lead terminal in the integrated circuit and causes a situation of a defective product. Or, it may cause an inspection failure due to poor contact between each external lead terminal in the integrated circuit and the contact terminal in the socket body. In particular, the occurrence of this defect is caused by the molding of the mold part in the mode part in the integrated circuit. When burrs or the like generated at that time adhered, they frequently occurred.

SUMMARY OF THE INVENTION The present invention provides a grasping and conveying device that reliably solves this problem without causing a drop of the integrated circuit during the transfer of the integrated circuit from the supply point to the inspection socket.

[Means for Solving the Problems]

In order to achieve this object, the present invention provides "a head is mounted on a carriage which reciprocates laterally between an inspection socket having a socket body having at least a guiding portion for the integrated circuit and a supply point of the integrated circuit. It is provided so that it can move up and down, and this head is configured to move up and down by a reciprocating mechanism such as a cylinder provided on the carriage.
In addition, in an inspection gripping device in which the head is provided with a collet for gripping the integrated circuit, the collet is immovable in the vertical direction with respect to the head, and is moved only in the front, rear, left, and right horizontal directions. While being freely mounted, the collet and the head are connected by spring means arranged at a plurality of positions in the circumferential direction, and further, a pair of left and right rollers are mounted on the carriage to move the head upward. It is provided so that the collet will enter between the rollers at that time. "

[Action]

In this structure, the collet mounted so as to be movable only in the front, rear, left, and right horizontal directions is held at a fixed position with respect to the head by a plurality of spring means that connect the collet and the head. .

When the integrated circuit is gripped at the integrated circuit supply point, the collet moves to a position substantially directly above the inspection socket, and then descends with the integrated circuit gripped. During this descent, the collet comes out of the space between the pair of left and right rollers and becomes freely movable in the front, rear, left, and right horizontal directions. Therefore, the mold part or the external terminal in the integrated circuit held by the collet is When contacting the guide part in the socket body of the inspection socket, the collet descends while escaping horizontally away from the guide part against the spring means connecting the collet and the head. By doing so, the integrated circuit can be properly loaded at a predetermined position in the socket body of the inspection socket such that each external terminal of the integrated circuit comes into contact with each contact terminal of the socket body. At the end, the collet lifts after releasing the grip of the integrated circuit.

And when the collet rises, the collet
When the integrated circuit gripped by the collet is laterally moved from the supply location to the inspection socket location by entering between the pair of left and right rollers provided on the carriage, the collet swings laterally. This prevents the integrated circuit from falling during its lateral transfer,
It is possible to reliably prevent lateral displacement.

[Effect of device]

Therefore, according to the present invention, after the integrated circuit at the supply point of the integrated circuit is transferred to the inspection socket,
Accurately loading at a predetermined loading position in the socket body of this inspection socket does not cause the integrated circuit to drop or laterally shift during its transfer.
In addition, there is an effect that it is possible to surely achieve without requiring the adjustment for strict alignment, and without causing deformation and inability to inspect each external lead terminal in the heavy duty circuit.

[Embodiment] An embodiment of the present invention, as shown in FIGS. 1 and 2, is a so-called quad type integrated circuit in which external terminals 1b are projected on all four side surfaces of a rectangular mold portion 1a. A drawing when applied to No. 1 will be described.

In the figure, reference numeral 2 indicates a tray for supplying the quad integrated circuit 1, reference numeral 3 indicates an inspection socket for inspecting the quad integrated circuit 1, and the inspection socket 3 is A socket body 4 having a through hole 4a for loading the integrated circuit 1 at a substantially central portion, and a pin 5a which can be opened and closed toward the upper surface of the socket body 4 with respect to one side surface of the socket body 4. It is composed of a lid body 5 pivotally attached and a locking body 6 which is pivotally attached to the other side surface of the socket main body 4 by a pin 6a and holds the lid body 4 in a closed state.

The socket body 4 is provided with a plurality of contact terminals 4b that come into contact with the external terminals 1b of the integrated circuit 1. Further, the socket body 4 has an upper surface on which a hole for loading the integrated circuit is formed. At the four corners of 4a, a guiding portion 4c formed on an inclined surface 4d that inclines outward on the inner side surface and protrudes upward.

Reference numeral 7 is a carriage that reciprocates laterally between the upper portion of the tray 2 and the upper portion of the inspection socket 3 as indicated by an arrow A, and reference numeral 8 is a pair of left and right sides of the carriage 7. Shown are heads that can be vertically moved through the guide rods 9,
The carriage 7 is provided with a hydraulic or pneumatic cylinder 14 for moving the head 8 up and down. Of course, the carriage 7 may be configured to move up and down by a reciprocating mechanism different from the cylinder 14.

Reference numeral 10 indicates a collet inserted into the fitting hole 8a of the head 8, and the collet 10 is hollow and its upper end is connected to a vacuum pump (not shown) via a hose 11 to The lower end is configured to hold the integrated circuit 1 by vacuum suction. In this case, in the embodiment, the case in which the collet 10 is of the vacuum suction type has been shown, but the collet 10 may be one which grips the integrated circuit 1 by other means.

While a gap is formed between the outer peripheral surface of the collet 10 and the inner surface of the fitting hole 8a in the head 8, a plurality of steel balls are formed on the upper and lower surfaces of the collar portion 10a formed in the middle of the collet 10. By inserting 11, 12, the collet 10
Is immovable with respect to the head 8 in the vertical direction, and is movable only in the front, rear, left, and right horizontal directions.

Further, the collet 10 and the head 8 are connected by springs 13 arranged at a plurality of positions in the circumferential direction (four positions on the front, rear, left and right in the drawing), while the carriage 7 is connected to the left and right. By providing one roller 15 so that the collet 10 enters between the rollers 15 when the head 8 moves up, the collet 10 moves forward, backward, leftward and rightward when the head 8 moves up. Prevent moving in the direction.

In the above structure, the collet 10 mounted on the head 8 so as to be movable in the front-rear, left-right and horizontal directions is
A plurality of springs 13 connecting between the head 10 and the head 8 holds the head 8 at a substantially central position in the fitting hole 8a.

When the carriage 7 moves to the upper part of the supply tray 2 of the integrated circuit 1, the head 8 is lowered, so that the collet 10
When the integrated circuit 1 is gripped at the lower end of the head by vacuum suction, the head 8 moves up and then the carriage 7 moves to a position above the inspection socket 3. At this time, the collet 10 is
By entering between the pair of left and right rollers 15 provided on the carriage 7, the collet 10 is prevented from freely moving in the front, rear, left and right horizontal directions.

Then, when the collet 10 moves to a position above the inspection socket 3, the head 8 descends. By this descent, the collet 10 mounted on the head 8 descends toward the inspection socket 3 while holding the integrated circuit 1 at the lower end thereof. Due to this lowering, the collet 10 comes out of the space between the pair of rollers 15 and is in a state in which it can freely move in the front, rear, left and right horizontal directions.

Then, while the collet 10 is descending, the molded portion 1a or the external terminal 1b in the grasped integrated circuit 1 is
Is a guiding part in the socket body 4 of the inspection socket 3.
When the inclined surface 4d in a certain guiding portion 4c of 4c comes into contact,
The collet 10 resists the spring 13 connecting between the collet 10 and the head 8 and resists the mold portion 1a or the external terminal 1b.
Is to move downward toward the guiding portion 4c on the side opposite to the certain guiding portion 4c with which the integrated circuit 1 comes into contact, so that the integrated circuit 1 is lowered.
The external terminals 1b of the integrated circuit 1 can be properly inserted into the holes 4a at predetermined positions in the socket so that the external terminals 1b come into contact with the contact terminals 4b of the socket body 4, and the loading is completed. And the collet 10
Rises after releasing the grip of the integrated circuit 1.

In this way, when the integrated circuit 1 is loaded into the socket body 4 of the inspection socket 3, the lid 5 is rotated in the direction of arrow B to close the external terminals 1a of the integrated circuit 1 so that the external terminals 1a are not connected to the socket body 3. Of the external terminals 1b of the integrated circuit 1 after pressing the contact terminals 4b in FIG. 1 and then rotating the locking body 6 in the direction of arrow C to keep the lid 5 closed. The performance of the integrated circuit 1 is tested by supplying power to an arbitrary external terminal and measuring whether or not a predetermined output is obtained from the other external terminal 1b.

[Brief description of drawings]

1 is a plan view of a quad type integrated circuit, FIG. 2 is a side view of FIG. 1, FIGS. 3 to 8 show an embodiment of the present invention, FIG. 3 is a vertical sectional front view, and FIG. Is a sectional view taken along line IV-IV in FIG.
5 is a sectional view taken along line VV in FIG. 3, and FIG. 6 is VI-VI in FIG.
FIG. 7 is an enlarged sectional view taken along line VII-VII of FIG. 3, and FIG. 8 is a sectional view taken along line VIII-VIII of FIG. 7. 1 ... Quad type integrated circuit, 1a ... Mold part, 1b ...
External terminals, 2 ... Integrated circuit supply tray, 3 ... Inspection socket, 4 ... Socket body, 4a ... Loading hole,
4c ... derivative, 5 ... lid, 7 ... carriage, 8 ... head, 14 ... cylinder, 10 ... collet, 11, 12 ... steel ball, 13 ... spring.

Claims (1)

[Scope of utility model registration request] 1. A head is provided on a carriage that reciprocates laterally between a test socket having at least a socket body having a guiding portion for the integrated circuit and a supply point of the integrated circuit, and a head is vertically movable. In the inspection gripping device, the head is configured to move up and down by a reciprocating mechanism such as a cylinder provided on the carriage, and the head is provided with a collet for gripping the integrated circuit, The collet is attached to the head such that it cannot move in the vertical direction and is movable only in the front, rear, left, and right horizontal directions, and at a plurality of positions in the circumferential direction between the collet and the head. A collection comprising a pair of left and right rollers connected to each other by spring means arranged so that the collet enters between the rollers when the head moves upward. Inspection for gripping transfer device of circuit.