JPH0636476Y2 - 有機金属供給用恒温槽 - Google Patents

有機金属供給用恒温槽

Info

Publication number
JPH0636476Y2
JPH0636476Y2 JP3986189U JP3986189U JPH0636476Y2 JP H0636476 Y2 JPH0636476 Y2 JP H0636476Y2 JP 3986189 U JP3986189 U JP 3986189U JP 3986189 U JP3986189 U JP 3986189U JP H0636476 Y2 JPH0636476 Y2 JP H0636476Y2
Authority
JP
Japan
Prior art keywords
tank
container
heated
organic metal
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3986189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02131195U (enExample
Inventor
明 吉野
健治 奥村
茂 黒宮
Original Assignee
大同ほくさん株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大同ほくさん株式会社 filed Critical 大同ほくさん株式会社
Priority to JP3986189U priority Critical patent/JPH0636476Y2/ja
Publication of JPH02131195U publication Critical patent/JPH02131195U/ja
Application granted granted Critical
Publication of JPH0636476Y2 publication Critical patent/JPH0636476Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Furnace Charging Or Discharging (AREA)
JP3986189U 1989-04-03 1989-04-03 有機金属供給用恒温槽 Expired - Fee Related JPH0636476Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3986189U JPH0636476Y2 (ja) 1989-04-03 1989-04-03 有機金属供給用恒温槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3986189U JPH0636476Y2 (ja) 1989-04-03 1989-04-03 有機金属供給用恒温槽

Publications (2)

Publication Number Publication Date
JPH02131195U JPH02131195U (enExample) 1990-10-31
JPH0636476Y2 true JPH0636476Y2 (ja) 1994-09-21

Family

ID=31549139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3986189U Expired - Fee Related JPH0636476Y2 (ja) 1989-04-03 1989-04-03 有機金属供給用恒温槽

Country Status (1)

Country Link
JP (1) JPH0636476Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4364425B2 (ja) * 1997-07-11 2009-11-18 アドバンスト テクノロジー マテリアルズ，インコーポレイテッド バルク化学物質供給システム

Also Published As

Publication number Publication date
JPH02131195U (enExample) 1990-10-31

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