JPH0634368Y2 - プラズマ処理装置 - Google Patents
プラズマ処理装置Info
- Publication number
- JPH0634368Y2 JPH0634368Y2 JP4090488U JP4090488U JPH0634368Y2 JP H0634368 Y2 JPH0634368 Y2 JP H0634368Y2 JP 4090488 U JP4090488 U JP 4090488U JP 4090488 U JP4090488 U JP 4090488U JP H0634368 Y2 JPH0634368 Y2 JP H0634368Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing
- plasma
- vacuum container
- plasma processing
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012545 processing Methods 0.000 title claims description 49
- 238000009832 plasma treatment Methods 0.000 description 6
- 208000028659 discharge Diseases 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- ZQBFAOFFOQMSGJ-UHFFFAOYSA-N hexafluorobenzene Chemical compound FC1=C(F)C(F)=C(F)C(F)=C1F ZQBFAOFFOQMSGJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4090488U JPH0634368Y2 (ja) | 1988-03-28 | 1988-03-28 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4090488U JPH0634368Y2 (ja) | 1988-03-28 | 1988-03-28 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147232U JPH01147232U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-10-11 |
| JPH0634368Y2 true JPH0634368Y2 (ja) | 1994-09-07 |
Family
ID=31267360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4090488U Expired - Lifetime JPH0634368Y2 (ja) | 1988-03-28 | 1988-03-28 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634368Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1988
- 1988-03-28 JP JP4090488U patent/JPH0634368Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01147232U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-10-11 |