JPH0632686Y2 - 半導体チップ用ウェハの取付け装置 - Google Patents
半導体チップ用ウェハの取付け装置Info
- Publication number
- JPH0632686Y2 JPH0632686Y2 JP1988158689U JP15868988U JPH0632686Y2 JP H0632686 Y2 JPH0632686 Y2 JP H0632686Y2 JP 1988158689 U JP1988158689 U JP 1988158689U JP 15868988 U JP15868988 U JP 15868988U JP H0632686 Y2 JPH0632686 Y2 JP H0632686Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support member
- magnet
- pressing
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988158689U JPH0632686Y2 (ja) | 1988-12-06 | 1988-12-06 | 半導体チップ用ウェハの取付け装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988158689U JPH0632686Y2 (ja) | 1988-12-06 | 1988-12-06 | 半導体チップ用ウェハの取付け装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0279036U JPH0279036U (ar) | 1990-06-18 |
JPH0632686Y2 true JPH0632686Y2 (ja) | 1994-08-24 |
Family
ID=31439240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988158689U Expired - Fee Related JPH0632686Y2 (ja) | 1988-12-06 | 1988-12-06 | 半導体チップ用ウェハの取付け装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0632686Y2 (ar) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6287385B1 (en) * | 1999-10-29 | 2001-09-11 | The Boc Group, Inc. | Spring clip for sensitive substrates |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844848U (ja) * | 1981-09-21 | 1983-03-25 | 日本電気株式会社 | 半導体ウエハ−固定用治具 |
-
1988
- 1988-12-06 JP JP1988158689U patent/JPH0632686Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0279036U (ar) | 1990-06-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |