JPH0632684Y2 - ロボットを用いた搬送装置 - Google Patents

ロボットを用いた搬送装置

Info

Publication number
JPH0632684Y2
JPH0632684Y2 JP1987189456U JP18945687U JPH0632684Y2 JP H0632684 Y2 JPH0632684 Y2 JP H0632684Y2 JP 1987189456 U JP1987189456 U JP 1987189456U JP 18945687 U JP18945687 U JP 18945687U JP H0632684 Y2 JPH0632684 Y2 JP H0632684Y2
Authority
JP
Japan
Prior art keywords
robot
article
handled
axis
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987189456U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0193733U (enrdf_load_stackoverflow
Inventor
正直 村田
Original Assignee
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼電機株式会社 filed Critical 神鋼電機株式会社
Priority to JP1987189456U priority Critical patent/JPH0632684Y2/ja
Publication of JPH0193733U publication Critical patent/JPH0193733U/ja
Application granted granted Critical
Publication of JPH0632684Y2 publication Critical patent/JPH0632684Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987189456U 1987-12-15 1987-12-15 ロボットを用いた搬送装置 Expired - Lifetime JPH0632684Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987189456U JPH0632684Y2 (ja) 1987-12-15 1987-12-15 ロボットを用いた搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987189456U JPH0632684Y2 (ja) 1987-12-15 1987-12-15 ロボットを用いた搬送装置

Publications (2)

Publication Number Publication Date
JPH0193733U JPH0193733U (enrdf_load_stackoverflow) 1989-06-20
JPH0632684Y2 true JPH0632684Y2 (ja) 1994-08-24

Family

ID=31480486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987189456U Expired - Lifetime JPH0632684Y2 (ja) 1987-12-15 1987-12-15 ロボットを用いた搬送装置

Country Status (1)

Country Link
JP (1) JPH0632684Y2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2580959B2 (ja) * 1993-07-13 1997-02-12 村田機械株式会社 物品移載装置
JP2580958B2 (ja) * 1993-07-13 1997-02-12 村田機械株式会社 物品移載装置
US6062798A (en) * 1996-06-13 2000-05-16 Brooks Automation, Inc. Multi-level substrate processing apparatus
EP2375104B1 (en) * 2008-12-19 2013-04-24 Kawabuchi Mechanical Engineering Laboratory, Inc. Linearly moving extendable mechanism and robot arm equipped with linearly moving extendable mechanism

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203234A (ja) * 1985-03-05 1986-09-09 Fujitsu Ltd 物品取出し装置

Also Published As

Publication number Publication date
JPH0193733U (enrdf_load_stackoverflow) 1989-06-20

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