JPH0632674Y2 - フォトレジスト塗布装置 - Google Patents

フォトレジスト塗布装置

Info

Publication number
JPH0632674Y2
JPH0632674Y2 JP2766389U JP2766389U JPH0632674Y2 JP H0632674 Y2 JPH0632674 Y2 JP H0632674Y2 JP 2766389 U JP2766389 U JP 2766389U JP 2766389 U JP2766389 U JP 2766389U JP H0632674 Y2 JPH0632674 Y2 JP H0632674Y2
Authority
JP
Japan
Prior art keywords
substrate
photoresist
substrate stage
base
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2766389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02118926U (US06368395-20020409-C00050.png
Inventor
英樹 鎌田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP2766389U priority Critical patent/JPH0632674Y2/ja
Publication of JPH02118926U publication Critical patent/JPH02118926U/ja
Application granted granted Critical
Publication of JPH0632674Y2 publication Critical patent/JPH0632674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP2766389U 1989-03-10 1989-03-10 フォトレジスト塗布装置 Expired - Lifetime JPH0632674Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2766389U JPH0632674Y2 (ja) 1989-03-10 1989-03-10 フォトレジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2766389U JPH0632674Y2 (ja) 1989-03-10 1989-03-10 フォトレジスト塗布装置

Publications (2)

Publication Number Publication Date
JPH02118926U JPH02118926U (US06368395-20020409-C00050.png) 1990-09-25
JPH0632674Y2 true JPH0632674Y2 (ja) 1994-08-24

Family

ID=31250348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2766389U Expired - Lifetime JPH0632674Y2 (ja) 1989-03-10 1989-03-10 フォトレジスト塗布装置

Country Status (1)

Country Link
JP (1) JPH0632674Y2 (US06368395-20020409-C00050.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001168011A (ja) * 1999-12-09 2001-06-22 Dainippon Screen Mfg Co Ltd 薄膜形成装置
JP2002231609A (ja) * 2001-02-02 2002-08-16 Matsushita Electric Ind Co Ltd 薬液塗布装置及び薬液塗布方法
JP2005246228A (ja) * 2004-03-03 2005-09-15 Dainippon Printing Co Ltd スピンコータ装置及びスピンコート方法

Also Published As

Publication number Publication date
JPH02118926U (US06368395-20020409-C00050.png) 1990-09-25

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