JPH0631718Y2 - ボ−ト搬送装置 - Google Patents
ボ−ト搬送装置Info
- Publication number
- JPH0631718Y2 JPH0631718Y2 JP1987095718U JP9571887U JPH0631718Y2 JP H0631718 Y2 JPH0631718 Y2 JP H0631718Y2 JP 1987095718 U JP1987095718 U JP 1987095718U JP 9571887 U JP9571887 U JP 9571887U JP H0631718 Y2 JPH0631718 Y2 JP H0631718Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- tube
- wafer
- seal plate
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987095718U JPH0631718Y2 (ja) | 1987-06-22 | 1987-06-22 | ボ−ト搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987095718U JPH0631718Y2 (ja) | 1987-06-22 | 1987-06-22 | ボ−ト搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS64327U JPS64327U (cs) | 1989-01-05 |
| JPH0631718Y2 true JPH0631718Y2 (ja) | 1994-08-22 |
Family
ID=30960599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987095718U Expired - Lifetime JPH0631718Y2 (ja) | 1987-06-22 | 1987-06-22 | ボ−ト搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0631718Y2 (cs) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4543059A (en) * | 1984-07-18 | 1985-09-24 | Quartz Engineering & Materials, Inc. | Slotted cantilever diffusion tube system and method and apparatus for loading |
-
1987
- 1987-06-22 JP JP1987095718U patent/JPH0631718Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64327U (cs) | 1989-01-05 |
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