JPH0630848Y2 - 基板受台の昇降装置 - Google Patents

基板受台の昇降装置

Info

Publication number
JPH0630848Y2
JPH0630848Y2 JP4849187U JP4849187U JPH0630848Y2 JP H0630848 Y2 JPH0630848 Y2 JP H0630848Y2 JP 4849187 U JP4849187 U JP 4849187U JP 4849187 U JP4849187 U JP 4849187U JP H0630848 Y2 JPH0630848 Y2 JP H0630848Y2
Authority
JP
Japan
Prior art keywords
substrate
film forming
forming chamber
shaft
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4849187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63154665U (enrdf_load_stackoverflow
Inventor
富佐雄 中村
淳一郎 西村
繁信 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4849187U priority Critical patent/JPH0630848Y2/ja
Publication of JPS63154665U publication Critical patent/JPS63154665U/ja
Application granted granted Critical
Publication of JPH0630848Y2 publication Critical patent/JPH0630848Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP4849187U 1987-03-30 1987-03-30 基板受台の昇降装置 Expired - Lifetime JPH0630848Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4849187U JPH0630848Y2 (ja) 1987-03-30 1987-03-30 基板受台の昇降装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4849187U JPH0630848Y2 (ja) 1987-03-30 1987-03-30 基板受台の昇降装置

Publications (2)

Publication Number Publication Date
JPS63154665U JPS63154665U (enrdf_load_stackoverflow) 1988-10-11
JPH0630848Y2 true JPH0630848Y2 (ja) 1994-08-17

Family

ID=30870069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4849187U Expired - Lifetime JPH0630848Y2 (ja) 1987-03-30 1987-03-30 基板受台の昇降装置

Country Status (1)

Country Link
JP (1) JPH0630848Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63154665U (enrdf_load_stackoverflow) 1988-10-11

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