JPH0625011Y2 - 半導体チップの基準線検出装置 - Google Patents
半導体チップの基準線検出装置Info
- Publication number
- JPH0625011Y2 JPH0625011Y2 JP1988018599U JP1859988U JPH0625011Y2 JP H0625011 Y2 JPH0625011 Y2 JP H0625011Y2 JP 1988018599 U JP1988018599 U JP 1988018599U JP 1859988 U JP1859988 U JP 1859988U JP H0625011 Y2 JPH0625011 Y2 JP H0625011Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light receiving
- reference line
- detection device
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 title claims description 11
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 230000004907 flux Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988018599U JPH0625011Y2 (ja) | 1988-02-15 | 1988-02-15 | 半導体チップの基準線検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988018599U JPH0625011Y2 (ja) | 1988-02-15 | 1988-02-15 | 半導体チップの基準線検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01123346U JPH01123346U (enrdf_load_stackoverflow) | 1989-08-22 |
| JPH0625011Y2 true JPH0625011Y2 (ja) | 1994-06-29 |
Family
ID=31233389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988018599U Expired - Lifetime JPH0625011Y2 (ja) | 1988-02-15 | 1988-02-15 | 半導体チップの基準線検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625011Y2 (enrdf_load_stackoverflow) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5722239U (enrdf_load_stackoverflow) * | 1980-07-11 | 1982-02-04 | ||
| JPS60194537A (ja) * | 1984-02-22 | 1985-10-03 | ケイエルエイ・インストラメンツ・コ−ポレ−シヨン | 整列装置 |
| JPS60187020A (ja) * | 1984-03-07 | 1985-09-24 | Canon Inc | 半導体回路製造用素子及びその位置決め装置 |
-
1988
- 1988-02-15 JP JP1988018599U patent/JPH0625011Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01123346U (enrdf_load_stackoverflow) | 1989-08-22 |
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