JPH0625010Y2 - ウエハの受渡し機構 - Google Patents
ウエハの受渡し機構Info
- Publication number
- JPH0625010Y2 JPH0625010Y2 JP13647388U JP13647388U JPH0625010Y2 JP H0625010 Y2 JPH0625010 Y2 JP H0625010Y2 JP 13647388 U JP13647388 U JP 13647388U JP 13647388 U JP13647388 U JP 13647388U JP H0625010 Y2 JPH0625010 Y2 JP H0625010Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- lever
- pin
- rod
- delivery mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007246 mechanism Effects 0.000 title claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 230000007723 transport mechanism Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 101100321304 Bacillus subtilis (strain 168) yxdM gene Proteins 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Discharge Of Articles From Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13647388U JPH0625010Y2 (ja) | 1988-10-19 | 1988-10-19 | ウエハの受渡し機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13647388U JPH0625010Y2 (ja) | 1988-10-19 | 1988-10-19 | ウエハの受渡し機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0258334U JPH0258334U (enrdf_load_stackoverflow) | 1990-04-26 |
| JPH0625010Y2 true JPH0625010Y2 (ja) | 1994-06-29 |
Family
ID=31397018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13647388U Expired - Fee Related JPH0625010Y2 (ja) | 1988-10-19 | 1988-10-19 | ウエハの受渡し機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625010Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002164423A (ja) * | 2000-11-28 | 2002-06-07 | Tokyo Seimitsu Co Ltd | ウェーハリフト装置を備えたウェーハ保持装置 |
| JP4745040B2 (ja) * | 2005-12-05 | 2011-08-10 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理装置 |
| JP6562305B2 (ja) * | 2015-12-03 | 2019-08-21 | 日本電気硝子株式会社 | 板ガラスの製造方法及び製造装置 |
-
1988
- 1988-10-19 JP JP13647388U patent/JPH0625010Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0258334U (enrdf_load_stackoverflow) | 1990-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |