JPH0624999Y2 - 成膜装置 - Google Patents

成膜装置

Info

Publication number
JPH0624999Y2
JPH0624999Y2 JP663988U JP663988U JPH0624999Y2 JP H0624999 Y2 JPH0624999 Y2 JP H0624999Y2 JP 663988 U JP663988 U JP 663988U JP 663988 U JP663988 U JP 663988U JP H0624999 Y2 JPH0624999 Y2 JP H0624999Y2
Authority
JP
Japan
Prior art keywords
substrate
heating
cart
cooling
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP663988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01110429U (id
Inventor
佳興 横山
博 高宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP663988U priority Critical patent/JPH0624999Y2/ja
Publication of JPH01110429U publication Critical patent/JPH01110429U/ja
Application granted granted Critical
Publication of JPH0624999Y2 publication Critical patent/JPH0624999Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP663988U 1988-01-20 1988-01-20 成膜装置 Expired - Lifetime JPH0624999Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP663988U JPH0624999Y2 (ja) 1988-01-20 1988-01-20 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP663988U JPH0624999Y2 (ja) 1988-01-20 1988-01-20 成膜装置

Publications (2)

Publication Number Publication Date
JPH01110429U JPH01110429U (id) 1989-07-26
JPH0624999Y2 true JPH0624999Y2 (ja) 1994-06-29

Family

ID=31210979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP663988U Expired - Lifetime JPH0624999Y2 (ja) 1988-01-20 1988-01-20 成膜装置

Country Status (1)

Country Link
JP (1) JPH0624999Y2 (id)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5190802B2 (ja) * 2009-02-25 2013-04-24 株式会社島津製作所 インライン成膜処理装置

Also Published As

Publication number Publication date
JPH01110429U (id) 1989-07-26

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