JPH06246894A - Manufacture of screen printing block - Google Patents

Manufacture of screen printing block

Info

Publication number
JPH06246894A
JPH06246894A JP6112593A JP6112593A JPH06246894A JP H06246894 A JPH06246894 A JP H06246894A JP 6112593 A JP6112593 A JP 6112593A JP 6112593 A JP6112593 A JP 6112593A JP H06246894 A JPH06246894 A JP H06246894A
Authority
JP
Japan
Prior art keywords
metal layer
primary
mask
electrodeposited metal
electrodeposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6112593A
Other languages
Japanese (ja)
Other versions
JP3398799B2 (en
Inventor
Hiroshi Shimazu
博士 嶋津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Hitachi Maxell Ltd
Maxell Holdings Ltd
Original Assignee
Kyushu Hitachi Maxell Ltd
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Hitachi Maxell Ltd, Hitachi Maxell Ltd filed Critical Kyushu Hitachi Maxell Ltd
Priority to JP6112593A priority Critical patent/JP3398799B2/en
Publication of JPH06246894A publication Critical patent/JPH06246894A/en
Application granted granted Critical
Publication of JP3398799B2 publication Critical patent/JP3398799B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE:To improve the handling properties of an extremely thin electrodeposit metal mask by reinforcing a primary electrodeposit metal layer working as a metal mask by means of a secondary electrodeposit metal layer as a reinforcing plate, being released from a matrix and sticking in tension to a plate frame through an elastic support body. CONSTITUTION:A primary electrodeposit metal layer 10 working as either one of a metal mask 2 or a reinforcing plate 12 is electrodeposited on the surface not coated with a photoresist film 9 of a matrix 5 by the thickness less than that of the photoresist film 9. Then, a secondary electrodeposit metal layer 11 working as another reinforcing plate 12 or the metal mask 2 is electrodeposited on the surface of the primary electrodeposit metal layer 10 after being released. Then the primary electrodeposit metal layer 10 is released from the matrix 5 together with the secondary electrodeposit metal layer 11. Then, peripheral sections 2a of the primary electrodeposit layer 10 of the secondary electrodeposit metal layer 11 working as the metal mask is bonded to and fixed with an elastic support body 4 of a plate frame 3 in the state of attaching the secondary electrodeposit metal layer 10 or the primary electrodeposit metal layer 11 working as the reinforcing plate 12.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、たとえばバーコードあ
るいはICやLSI用プリント配線などのスクリーン印
刷に好適に使用される、電鋳製メタルマスクからなるス
クリーン印刷版の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a screen printing plate composed of an electroformed metal mask, which is preferably used for screen printing of bar codes or IC or LSI printed wiring.

【0002】[0002]

【従来の技術】電鋳により製造されたスクリーン印刷用
のメタルマスクは耐薬品性、耐摩耗性に優れ、スキージ
の印圧による寸法変化が極めて小さく、比較的に精度の
高いシャープな印刷を期することができることはよく知
られている。
2. Description of the Related Art A metal mask for screen printing manufactured by electroforming has excellent chemical resistance and abrasion resistance, and the dimensional change due to the printing pressure of a squeegee is extremely small. It is well known that you can do it.

【0003】[0003]

【発明が解決しようとする課題】近年、バーコードなど
をスクリーン印刷するためにその印刷厚を薄くすること
が要求されており、これに伴ってそのスクリーン印刷に
使用されるメタルマスクは必然的に極薄、例えば10μ
厚程度のものが要求される。しかし、こうした極薄のメ
タルマスクを電鋳する場合、そのメタルマスクは電鋳後
母型から剥離する時やメタルマスクの運搬、搬送中、あ
るいは版枠に張り付ける時に変形しやすく、また打痕や
しわ付きなどが発生しやすくて非常に取扱いにくい。
In recent years, it has been required to reduce the printing thickness of a bar code or the like for screen printing, and accordingly, the metal mask used for the screen printing is inevitable. Ultra thin, eg 10μ
Thick materials are required. However, when electroforming such an ultra-thin metal mask, the metal mask is easily deformed when it is peeled off from the mother die after electroforming, during transportation or transportation of the metal mask, or when it is attached to the plate frame. It is very difficult to handle because it is prone to wrinkles and wrinkles.

【0004】本発明の目的は、極薄の電鋳製メタルマス
クもこれに変形や打痕などを加えることなく安全に母型
から剥離したり版枠に張り付けることを可能にし、取扱
性の向上を図ることのできるスクリーン印刷版の製造方
法を提供しようとするものである。
An object of the present invention is to enable ultrathin electroformed metal masks to be safely peeled from a mother die or attached to a plate frame without being deformed or dented, thereby facilitating handling. An object of the present invention is to provide a method for producing a screen printing plate that can be improved.

【0005】[0005]

【課題を解決するための手段】本発明では、メタルマス
クを電鋳し、電鋳後これを版枠に取付け終えるまでの間
に、メタルマスクの補強として該マスクに剥離可能に電
着形成した補強板を付けたままにし、最終的にはその補
強板をメタルマスクから剥がし取る、というものであ
る。すなわち、本発明のスクリーン印刷版の製造方法で
は、図1にその製造工程を例示するように、先ず、母型
5の表面にフォトレジスト6を配する。次いで、フォト
レジスト6の表面に、印刷パターンフィルム7を置いて
露光した後、現像して印刷パターンのフォトレジスト膜
9をメタルマスク2の厚みよりも厚く形成する。次い
で、メタルマスク2または補強板12のうち何れか一方
に相当する1次電着金属層10を、母型5のフォトレジ
スト膜9で覆われていない表面に、フォトレジスト膜9
の厚み以下に電着形成する。次いで、他方の補強板12
またはメタルマスク2に相当する2次電着金属層11
を、1次電着金属層10の表面に剥離処理を施したうえ
で電着形成する。次いで、母型5から1次電着金属層1
0を2次電着金属層11ごと剥離する。次いで、メタル
マスク2に相当する1次電着金属層10または2次電着
金属層11が、補強板12に相当する2次電着金属層1
1または1次電着金属層10を付けたままの状態でその
周辺部2aを版枠3の弾性支持体4に結合固定する。最
後に、補強板12に相当する2次電着金属層11または
1次電着金属層10を、メタルマスク2に相当する1次
電着金属層10または2次電着金属層11から剥離する
According to the present invention, a metal mask is electroformed, and is formed by electrodeposition so that the metal mask can be peeled off as a reinforcement of the metal mask before the completion of attachment to the plate frame after electroforming. With the reinforcement plate still attached, the reinforcement plate is finally peeled off from the metal mask. That is, in the method for manufacturing a screen printing plate of the present invention, as shown in the manufacturing process in FIG. 1, first, the photoresist 6 is arranged on the surface of the matrix 5. Next, a print pattern film 7 is placed on the surface of the photoresist 6 and exposed to light, and then developed to form a photoresist film 9 having a print pattern thicker than the metal mask 2. Then, the primary electrodeposited metal layer 10 corresponding to either the metal mask 2 or the reinforcing plate 12 is formed on the surface of the matrix 5 not covered with the photoresist film 9 by the photoresist film 9
The thickness is less than or equal to the electrode thickness. Then, the other reinforcing plate 12
Alternatively, the secondary electrodeposited metal layer 11 corresponding to the metal mask 2
Is subjected to peeling treatment on the surface of the primary electrodeposited metal layer 10 and then electrodeposited. Then, from the master block 5 to the primary electrodeposited metal layer 1
0 is peeled off together with the secondary electrodeposited metal layer 11. Then, the primary electrodeposited metal layer 10 or the secondary electrodeposited metal layer 11 corresponding to the metal mask 2 is replaced with the secondary electrodeposited metal layer 1 corresponding to the reinforcing plate 12.
The peripheral portion 2a is bonded and fixed to the elastic support 4 of the plate frame 3 with the primary or primary electrodeposited metal layer 10 still attached. Finally, the secondary electrodeposition metal layer 11 or the primary electrodeposition metal layer 10 corresponding to the reinforcing plate 12 is peeled from the primary electrodeposition metal layer 10 or the secondary electrodeposition metal layer 11 corresponding to the metal mask 2.

【0006】[0006]

【作用】メタルマスク2に相当する1次電着金属層10
または2次電着金属層11は、補強板12に相当する2
次電着金属層11または1次電着金属層10を付けて補
強された状態下で、母型5から剥離し、また版枠3に弾
性支持体4を介して緊張状態に張りつけるので、メタル
マスク2が極薄に形成される場合もこれに変形や打痕な
どを加えるようなことが無くなる。
Function: Primary electrodeposited metal layer 10 corresponding to the metal mask 2
Alternatively, the secondary electrodeposited metal layer 11 corresponds to the reinforcing plate 12
Under the condition that the secondary electrodeposited metal layer 11 or the primary electrodeposited metal layer 10 is attached and reinforced, the secondary electrodeposited metal layer 11 or the primary electrodeposited metal layer 10 is peeled off, and the plate frame 3 is attached to the plate frame 3 through the elastic support 4 in a tensioned state. Even when the mask 2 is formed to be extremely thin, it is not necessary to add deformation or dents to it.

【0007】[0007]

【実施例】本発明の一実施例を図1ないし図3に基づき
説明する。本発明により得られるスクリーン印刷版は、
図2および図3に示すように、電鋳により、バーコード
など所望の印刷パターンにパターンニング形成された多
数のパターン孔1を有するメタルマスク2と、版枠3
と、版枠3にメタルマスク2を緊張状態に取付けるナイ
ロンやポリエステル繊維のメッシュなどからなる弾性支
持体4とからなり、メタルマスク2のパターン孔1の領
域の四方外周を囲む周辺部2aが弾性支持体4に重合接
着して固定されている。スクリーン印刷においては、こ
の印刷版のメタルマスク2の上にインキやペーストを乗
せ、スキージをかけてパターン孔1から下方に吐出して
被印刷対象物に付着させる。このとき、メタルマスク2
は弾性支持体4の弾性により、スキージ圧で被印刷対象
物に接し、スキージ圧を解いた後にはその弾性復元力に
より被印刷対象物から直ちに版離れが行われる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to FIGS. The screen printing plate obtained by the present invention,
As shown in FIGS. 2 and 3, a metal mask 2 having a large number of pattern holes 1 patterned into a desired printing pattern such as a bar code by electroforming and a plate frame 3 are formed.
And the elastic support 4 made of nylon or polyester fiber mesh for attaching the metal mask 2 to the plate frame 3 in a tensioned state, and the peripheral portion 2a surrounding the outer periphery of the pattern hole 1 of the metal mask 2 on all sides is elastic. It is polymerized and fixed to the support 4. In screen printing, ink or paste is placed on the metal mask 2 of the printing plate, and a squeegee is applied to eject the ink or paste downward from the pattern holes 1 to attach the ink or paste to an object to be printed. At this time, the metal mask 2
Due to the elasticity of the elastic support 4, the printing target is brought into contact with the printing target by the squeegee pressure, and after releasing the squeegee pressure, the plate is immediately released from the printing target by the elastic restoring force.

【0008】図1の(A)ないし(H)はかかるスクリ
ーン印刷版を得るまでの工程図を示している。まず、メ
タルマスク2を電鋳するが、これと同時にメタルマスク
2の補強として該マスク2の片面に補強板12を剥離可
能に電着形成する。この電鋳に際しては、図1の(A)
に示すように、ステンレス製の母型5の表面に、メタル
マスク2の厚みよりも厚いフォトレジスト6を配する。
フィルムからなるフォトレジスト6をラミネートするに
代えて、液状のフォトレジストを塗布することもでき
る。これらフォトレジストとしては、たとえば、日本合
成化学工業(株)製のALPHO321Y50などを用
いる。
FIGS. 1A to 1H show process charts for obtaining such a screen printing plate. First, the metal mask 2 is electroformed, and at the same time, as a reinforcement of the metal mask 2, a reinforcing plate 12 is electrodeposited on one surface of the mask 2 in a peelable manner. In this electroforming, (A) of FIG.
As shown in, a photoresist 6 thicker than the thickness of the metal mask 2 is provided on the surface of the stainless master block 5.
Instead of laminating the photoresist 6 made of a film, a liquid photoresist can be applied. As these photoresists, for example, ALPHO321Y50 manufactured by Nippon Synthetic Chemical Industry Co., Ltd. is used.

【0009】次いで、同図の(B)に示すようにフォト
レジスト6の上に所望のスクリーン印刷用マスクの印刷
パターンフィルム7を密着させ、焼き付け、現像、乾燥
の各処理を行って、同図の(C)に示すごとき所望の印
刷パターンのフォトレジスト膜9をメタルマスク2の厚
みよりも厚く形成する。
Next, as shown in FIG. 3B, a desired print pattern film 7 of a mask for screen printing is brought into close contact with the photoresist 6, and each process of baking, developing and drying is carried out. As shown in (C), the photoresist film 9 having a desired print pattern is formed to be thicker than the metal mask 2.

【0010】次いで、これを電着槽、たとえばスルファ
ミン酸ニッケル浴に浸漬してニッケル電鋳を行なって、
同図の(D)に示すごとく母型5のフォトレジスト膜9
で覆われていない表面に薄いメタルマスク2に相当する
1次電着金属層10を、例えば10μ厚に形成する。
Then, this is immersed in an electrodeposition tank, for example, a nickel sulfamate bath to perform nickel electroforming,
As shown in (D) of the figure, the photoresist film 9 of the matrix 5 is formed.
A primary electrodeposited metal layer 10 corresponding to the thin metal mask 2 is formed on the surface not covered with the electrode to a thickness of 10 μm, for example.

【0011】次いで、1次電着金属層10の表面に亜セ
レン酸、重クロム酸などで剥離処理を施した後、2次電
鋳して同図の(E)に示すように1次電着金属層10の
表面に、補強板12に相当する2次電着金属層11を1
次電着金属層10の厚みと等しいか、それよりも厚く、
例えば30μ厚に形成する。
Then, the surface of the primary electrodeposited metal layer 10 is stripped with selenious acid, dichromic acid or the like, and then secondary electroforming is performed, as shown in FIG. A secondary electrodeposited metal layer 11 corresponding to the reinforcing plate 12 is formed on the surface of the electrodeposited metal layer 10.
Equal to or thicker than the thickness of the next electrodeposited metal layer 10,
For example, it is formed to a thickness of 30 μm.

【0012】2次電鋳後、フォトレジスト膜9を水酸化
ナトリウム溶液あるいは市販のフォトレジスト除去液で
除去した後、同図の(F)に示すように1次電着金属層
10を2次電着金属層11ごと母型5から剥離する。こ
のように1次電着金属層10を2次電着金属層11を付
けて補強したまま剥離すると、その1次電着金属層10
に変形や打痕などを加えるようなことが無くなった。
After the secondary electroforming, the photoresist film 9 is removed with a sodium hydroxide solution or a commercially available photoresist removing solution, and then the primary electrodeposited metal layer 10 is secondary-coated as shown in FIG. The electrodeposited metal layer 11 is peeled off from the matrix 5. In this way, when the primary electrodeposited metal layer 10 is peeled off while being reinforced by the secondary electrodeposited metal layer 11, the primary electrodeposited metal layer 10 is peeled off.
It is no longer necessary to add deformation or dents to the.

【0013】剥離後、メタルマスク2に相当する1次電
着金属層10は版枠3に張りつけるが、このときも、同
図の(G)に示すようにその1次電着金属層10は補強
板12に相当する2次電着金属層11を付けたままその
周辺部2aを、版枠3に緊張状態で張設された弾性支持
体4の上に重ね、この重合面間を感光性樹脂や有機系の
接着剤13などで結合固定する(図3参照)。この周辺
部2aの結合固定に際しては、図2および図3に示すよ
うに周辺部2aに結合孔14をパターン孔1のパターン
ニング形成と同時に設けておけば、これに接着剤13が
埋入して両者2a・4の結合強度を高めることができ
る。このように、メタルマスク2に相当する1次電着金
属層10を版枠3の弾性支持体4の上に重ねて結合する
ときもその1次電着金属層10は2次電着金属層11を
付けたまま行われるため、その1次電着金属層10が薄
くてもこれに変形や打痕などが発生するようなことが無
くなった。
After the peeling, the primary electrodeposited metal layer 10 corresponding to the metal mask 2 is attached to the plate frame 3. At this time, as shown in FIG. While the secondary electrodeposition metal layer 11 corresponding to the reinforcing plate 12 is attached, the peripheral portion 2a thereof is superposed on the elastic support 4 stretched in a tension state on the plate frame 3, and the area between the overlapping surfaces is photosensitive. It is bonded and fixed with a resin or an organic adhesive 13 (see FIG. 3). When connecting and fixing the peripheral portion 2a, as shown in FIGS. 2 and 3, if the connecting hole 14 is provided in the peripheral portion 2a at the same time as the patterning formation of the pattern hole 1, the adhesive 13 is embedded therein. It is possible to increase the bonding strength between the two 2a and 4a. Thus, even when the primary electrodeposited metal layer 10 corresponding to the metal mask 2 is overlaid on and bonded to the elastic support 4 of the plate frame 3, the primary electrodeposited metal layer 10 is the secondary electrodeposited metal layer. Since the process is performed with 11 attached, even if the primary electrodeposited metal layer 10 is thin, deformation or dents do not occur.

【0014】最後に、同図の(H)に示すように2次電
着金属層11を1次電着金属層10から剥離し、カッタ
ーなどにより弾性支持体4を、接着剤13で結合された
メタルマスク2の周辺部2aの内側でカットすることに
より、メタルマスク2は弾性支持体4を介して版枠3に
緊張状態で弾性支持され、図2および図3に示すごとき
スクリーン印刷版を得ることができる。また、弾性支持
体4の上記カット工程は2次電着金属層11を剥離する
前に行ってもよく、この場合は弾性支持体4をカットす
ることでメタルマスク2自体が弾性支持体4により版枠
3に緊張状態で張設固定され、その後2次電着金属層1
1を剥離する時も、メタルマスク2に相当する1次電着
金属層10は、弾性支持体4を介して緊張状態で版枠3
に保持されているため、2次電着金属層11の剥離によ
ってメタルマスク2自体に打痕や変形が生じることはな
い。
Finally, as shown in FIG. 1H, the secondary electrodeposited metal layer 11 is peeled off from the primary electrodeposited metal layer 10, and the elastic support 4 is bonded with the adhesive 13 by a cutter or the like. By cutting inside the peripheral portion 2a of the metal mask 2, the metal mask 2 is elastically supported by the plate frame 3 via the elastic support 4 in a tensioned state, and the screen printing plate as shown in FIGS. Obtainable. Further, the above-mentioned cutting step of the elastic support 4 may be performed before peeling off the secondary electrodeposited metal layer 11. In this case, the elastic support 4 is cut so that the metal mask 2 itself is cut by the elastic support 4. It is tensioned and fixed to the plate frame 3 and then the secondary electrodeposited metal layer 1
Even when peeling off 1, the primary electrodeposited metal layer 10 corresponding to the metal mask 2 is tensioned via the elastic support 4 and the plate frame 3
Since the second electrodeposition metal layer 11 is peeled off, the metal mask 2 itself is not dented or deformed.

【0015】メタルマスク2に相当する1次電着金属層
10の表面の剥離処理後で2次電鋳前に、図4に示すよ
うに、その1次電着金属層10の周辺部2aに絶縁テー
プ15を貼り付けておけば、2次電鋳時にその絶縁テー
プ15の上にだけ2次電着金属層11が形成されないた
め、この後工程で1次電着金属層10から2次電着金属
層11を剥離するときその端12aがつかみ易くなり、
その剥離が容易に行える。また、そのように絶縁テープ
15を貼り付けておけば、メタルマスク2の結合孔14
を有する周辺部2aと版枠3の弾性支持体4との重合面
間を接着剤13で接着するとき、接着剤13が結合孔1
4から接着面と反対側の面にはみ出るのを絶縁テープ1
5により防止できて有利である。
After the surface of the primary electrodeposited metal layer 10 corresponding to the metal mask 2 is peeled off and before the secondary electroforming, as shown in FIG. 4, a peripheral portion 2a of the primary electrodeposited metal layer 10 is formed. If the insulating tape 15 is attached, the secondary electrodeposited metal layer 11 is not formed only on the insulating tape 15 during the secondary electroforming, so that in the subsequent process, the secondary electrodeposited metal layer 10 will not be formed. When peeling the deposited metal layer 11, the end 12a is easily grasped,
The peeling can be easily performed. Further, if the insulating tape 15 is attached in such a manner, the coupling hole 14 of the metal mask 2
When the adhesive 13 is used to bond the superposed portions of the peripheral portion 2 a having the edges and the elastic support 4 of the plate frame 3 with each other,
Insulation tape 1 should be projected from 4 to the surface opposite to the adhesive surface.
5 can be prevented, which is advantageous.

【0016】上記実施例では、メタルマスク2となる1
次電着金属層10を形成した後、補強板12となる2次
電着金属層11を形成したが、それとは逆に、他の実施
例として挙げる図5の製造工程図に示すように先に補強
板12となる1次電着金属層10を形成し(図5の
(D))、この後メタルマスク2となる2次電着金属層
11を形成することもできる(同図の(E))。この場
合、パターンニング工程(同図の(A)ないし
(C))、母型5からの剥離工程(同図の(F))、版
枠3の弾性支持体4への結合工程(同図の(G))、補
強板12の剥離工程(同図の(H))は上記実施例の場
合と同様である。なお、この実施例の場合、母型5から
剥離する前に、すなわち同図の(E)の工程後にメタル
マスク2となる2次電着金属層11の表面を研磨する工
程を加えてもよい。なお、ニッケル電鋳に代えて、ニッ
ケル−コバルト合金などで電鋳を行うこともできる。
In the above embodiment, the metal mask 2 1
After forming the next electrodeposited metal layer 10, the secondary electrodeposited metal layer 11 to be the reinforcing plate 12 was formed. On the contrary, as shown in the manufacturing process diagram of FIG. It is also possible to form the primary electrodeposited metal layer 10 to be the reinforcing plate 12 ((D) of FIG. 5) and then to form the secondary electrodeposited metal layer 11 to be the metal mask 2 (( E)). In this case, a patterning step ((A) to (C) in the same figure), a peeling step from the mother die 5 ((F) in the same figure), and a step of connecting the plate frame 3 to the elastic support 4 (the same figure). (G)) and the step of peeling the reinforcing plate 12 ((H) in the figure) are the same as those in the above-mentioned embodiment. In the case of this embodiment, a step of polishing the surface of the secondary electrodeposited metal layer 11 to be the metal mask 2 may be added before peeling from the mother die 5, that is, after the step (E) in the figure. . Instead of nickel electroforming, nickel-cobalt alloy or the like may be used for electroforming.

【0017】[0017]

【発明の効果】本発明によれば、極薄のメタルマスク2
を電鋳するに際してそれに重ねて補強板12を剥離可能
に電着形成し、メタルマスク2はその補強板12を付け
て補強したままの状態で母型5から剥離したり、版枠3
に張りつけるので、これら母型5からの剥離やメタルマ
スク2の運搬、搬送時および版枠3への張り付けが変形
や打痕などを加える危惧なく安全かつ容易に行え、印刷
厚の薄いスクリーン印刷が精度よく実現できるに至っ
た。
According to the present invention, the ultrathin metal mask 2
When electroforming, the reinforcing plate 12 is formed by electrodeposition so as to be separable so as to be overlapped with it, and the metal mask 2 is separated from the mother die 5 with the reinforcing plate 12 attached and is reinforced, or the plate frame 3
Since it is attached to the master mold 5, the peeling from the mother die 5, the transportation and transportation of the metal mask 2 and the attachment to the plate frame 3 can be safely and easily performed without fear of causing deformation or dents, and thin screen printing can be performed. It has come to be possible with high accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示すスクリーン印刷版の製
造工程図である。
FIG. 1 is a process drawing of a screen printing plate showing an embodiment of the present invention.

【図2】スクリーン印刷版の平面図である。FIG. 2 is a plan view of a screen printing plate.

【図3】図2におけるX−X線拡大断面図である。FIG. 3 is an enlarged sectional view taken along line XX in FIG.

【図4】スクリーン印刷版のメタルマスクの周辺部と弾
性支持体との結合構造を補強板を剥がす前の状態で示
す、その断面図である。
FIG. 4 is a cross-sectional view showing a connection structure between a peripheral portion of a metal mask of a screen printing plate and an elastic support member before a reinforcing plate is peeled off.

【図5】他の実施例を示すスクリーン印刷版の製造工程
図である。
FIG. 5 is a manufacturing process diagram of a screen printing plate showing another embodiment.

【符号の説明】[Explanation of symbols]

2 メタルマスク 3 版枠 4 弾性支持体 5 母型 6 フォトレジスト 7 印刷パターンフィルム 9 フォトレジスト膜 10 1次電着金属層 11 2次電着金属層 12 補強板 2 Metal Mask 3 Plate Frame 4 Elastic Support 5 Master 6 Photoresist 7 Printing Pattern Film 9 Photoresist Film 10 Primary Electrodeposited Metal Layer 11 Secondary Electrodeposited Metal Layer 12 Reinforcement Plate

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 母型5の表面にフォトレジスト6を配す
る工程と、 フォトレジスト6の表面に、印刷パターンフィルム7を
置いて露光した後、現像して印刷パターンのフォトレジ
スト膜9をメタルマスク2の厚みよりも厚く形成する工
程と、 メタルマスク2または補強板12のうち何れか一方に相
当する1次電着金属層10を、母型5のフォトレジスト
膜9で覆われていない表面に、フォトレジスト膜9の厚
み以下に電着形成する工程と、 他方の補強板12またはメタルマスク2に相当する2次
電着金属層11を、1次電着金属層10の表面に剥離処
理を施したうえで電着形成する工程と、 母型5から1次電着金属層10を2次電着金属層11ご
と剥離する工程と、 メタルマスク2に相当する1次電着金属層10または2
次電着金属層11が、補強板12に相当する2次電着金
属層11または1次電着金属層10を付けたままの状態
でその周辺部2aを版枠3の弾性支持体4に結合固定す
る工程と、 補強板12に相当する2次電着金属層11または1次電
着金属層10を、メタルマスク2に相当する1次電着金
属層10または2次電着金属層11から剥離する工程と
からなるスクリーン印刷版の製造方法。
1. A step of disposing a photoresist 6 on the surface of a mother die 5, and a printing pattern film 7 is placed on the surface of the photoresist 6 and exposed, and then developed to develop a photoresist film 9 having a printing pattern on a metal. The step of forming the mask 2 thicker than the thickness of the mask 2 and the surface of the master electrode 5 not covered with the photoresist film 9 of the primary electrodeposited metal layer 10 corresponding to either the metal mask 2 or the reinforcing plate 12. First, a step of electrodeposition forming to a thickness of the photoresist film 9 or less, and a second electrodeposition metal layer 11 corresponding to the other reinforcing plate 12 or the metal mask 2 on the surface of the primary electrodeposition metal layer 10 is peeled off. A step of forming the electrodeposited metal layer 10 after the formation of the metal mask, a step of peeling the primary electrodeposited metal layer 10 together with the secondary electrodeposited metal layer 11 from the mother die 5, and a primary electrodeposited metal layer 10 corresponding to the metal mask 2. Or 2
The secondary electrodeposited metal layer 11 remains attached to the secondary electrodeposited metal layer 11 or the primary electrodeposited metal layer 10 corresponding to the reinforcing plate 12, and its peripheral portion 2a is attached to the elastic support 4 of the plate frame 3. The step of bonding and fixing, and the secondary electrodeposited metal layer 11 or the primary electrodeposited metal layer 10 corresponding to the reinforcing plate 12, the primary electrodeposited metal layer 10 or the secondary electrodeposited metal layer 11 corresponding to the metal mask 2. A method for producing a screen printing plate, which comprises a step of peeling from the screen.
JP6112593A 1993-02-24 1993-02-24 Screen printing plate manufacturing method Expired - Fee Related JP3398799B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6112593A JP3398799B2 (en) 1993-02-24 1993-02-24 Screen printing plate manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6112593A JP3398799B2 (en) 1993-02-24 1993-02-24 Screen printing plate manufacturing method

Publications (2)

Publication Number Publication Date
JPH06246894A true JPH06246894A (en) 1994-09-06
JP3398799B2 JP3398799B2 (en) 2003-04-21

Family

ID=13162052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6112593A Expired - Fee Related JP3398799B2 (en) 1993-02-24 1993-02-24 Screen printing plate manufacturing method

Country Status (1)

Country Link
JP (1) JP3398799B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016175056A1 (en) * 2015-04-29 2016-11-03 Towa株式会社 Article manufacturing apparatus and manufacturing method
WO2016175057A1 (en) * 2015-04-29 2016-11-03 Towa株式会社 Article manufacturing apparatus and manufacturing method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016175056A1 (en) * 2015-04-29 2016-11-03 Towa株式会社 Article manufacturing apparatus and manufacturing method
WO2016175057A1 (en) * 2015-04-29 2016-11-03 Towa株式会社 Article manufacturing apparatus and manufacturing method
JP2016210007A (en) * 2015-04-29 2016-12-15 Towa株式会社 Article manufacturing apparatus and manufacturing method
JP2016210006A (en) * 2015-04-29 2016-12-15 Towa株式会社 Article manufacturing apparatus and manufacturing method
CN107530914A (en) * 2015-04-29 2018-01-02 东和株式会社 The manufacture device and manufacture method of article
CN107530913A (en) * 2015-04-29 2018-01-02 东和株式会社 The manufacture device and manufacture method of article
TWI616247B (en) * 2015-04-29 2018-03-01 Towa Corp Article manufacturing device and manufacturing method
CN107530913B (en) * 2015-04-29 2019-09-27 东和株式会社 The manufacturing device and manufacturing method of article

Also Published As

Publication number Publication date
JP3398799B2 (en) 2003-04-21

Similar Documents

Publication Publication Date Title
KR100704688B1 (en) Method for producing mask for evaporation and the mask for evaporation
JPH08183151A (en) Manufacture of mesh-integrated metal mask
US4869760A (en) Method for production of metallic sticker
JP3120130B2 (en) Manufacturing method of metal mask plate for printing
JPH06246894A (en) Manufacture of screen printing block
JP4863247B2 (en) Metal porous body and method for producing the same
JP4671255B2 (en) Method for producing electroformed metal mask
JPH11323592A (en) Electroformed metallic body and its production
JPH06234202A (en) Manufacture of mask for screen printing
JPH09279365A (en) Method for producing fine structural parts
JPS63303737A (en) Metal mask for screen printing and its manufacture
JPH03262690A (en) Mask for screen printing and preparation thereof
JPS63203787A (en) Production of suspended metal mask plate
JP2831060B2 (en) Electroformed IC lead frame
JP2987390B2 (en) Screen mask manufacturing method
JPH09216475A (en) Screen process printing plate and manufacture thereof
JPH07331479A (en) Formation of electrodeposited image
JPH0659226A (en) Adhesion method for protective cover of liquid crystal display material and production of metallic mask plate
US5501785A (en) Process for manufacturing electroformed patterns
JP4861507B2 (en) Metal porous body and method for producing the same
JPS6318674B2 (en)
JPH06346271A (en) Nickel laminate and its production
JPH0683067A (en) Production of printing plate
JPH10323962A (en) Manufacture of mesh integral-type metal mask
JP2005212111A (en) Plate for screen printing, and manufacturing method therefor

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080221

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 6

Free format text: PAYMENT UNTIL: 20090221

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 6

Free format text: PAYMENT UNTIL: 20090221

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100221

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 8

Free format text: PAYMENT UNTIL: 20110221

LAPS Cancellation because of no payment of annual fees