JP3120130B2 - Manufacturing method of metal mask plate for printing - Google Patents

Manufacturing method of metal mask plate for printing

Info

Publication number
JP3120130B2
JP3120130B2 JP04073376A JP7337692A JP3120130B2 JP 3120130 B2 JP3120130 B2 JP 3120130B2 JP 04073376 A JP04073376 A JP 04073376A JP 7337692 A JP7337692 A JP 7337692A JP 3120130 B2 JP3120130 B2 JP 3120130B2
Authority
JP
Japan
Prior art keywords
printing
mask plate
metal mask
electroformed
mounting component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04073376A
Other languages
Japanese (ja)
Other versions
JPH0692053A (en
Inventor
博士 嶋津
良弘 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Hitachi Maxell Ltd
Original Assignee
Kyushu Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Hitachi Maxell Ltd filed Critical Kyushu Hitachi Maxell Ltd
Priority to JP04073376A priority Critical patent/JP3120130B2/en
Publication of JPH0692053A publication Critical patent/JPH0692053A/en
Application granted granted Critical
Publication of JP3120130B2 publication Critical patent/JP3120130B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、たとえば、プリント配
線板上への実装工程においてプリント配線板上に各種の
1次実装部品を搭載したのち、更に2次実装部品を搭載
するためのクリーム半田印刷などをするときに用いられ
る、印刷用メタルマスク版の製造方法に関する。
BACKGROUND OF THE INVENTION The present invention relates to, for example, a cream solder for mounting various primary mounted components on a printed wiring board in a mounting process on the printed wiring board, and further mounting a secondary mounted component on the printed wiring board. The present invention relates to a method for producing a printing metal mask plate used for printing or the like.

【0002】[0002]

【従来の技術】この種の印刷用メタルマスク版は、たと
えば、実開昭61−7067号公報や同61−9807
0号公報に開示されているようにプリント配線板上の1
次実装部品から逃げるために該部品の厚みや高さに応じ
た形の凹部が形成されるが、この1次実装部品逃げ用凹
部は印刷用メタルマスク版の版厚内でエッチングなどで
形成するものである。しかし、これでは実装部品逃げ用
凹部の深さは印刷用メタルマスク版の厚み以下に制約さ
れるため、1次実装部品の高さは制限されるとともに、
実装部品逃げ用凹部の深いものを得るには印刷用メタル
マスク版を厚み大にしなければならず、印刷用メタルマ
スク版を厚くすると印刷厚が必要以上に厚くなり、適正
な印刷用メタルマスク厚が設定できないといった問題が
ある。
2. Description of the Related Art This type of printing metal mask plate is disclosed, for example, in Japanese Utility Model Laid-Open Publication No. 61-7067 or 61-9980.
No. 1 on a printed wiring board as disclosed in
In order to escape from the next mounted component, a concave portion having a shape corresponding to the thickness and height of the component is formed. The concave portion for escaping the primary mounted component is formed by etching or the like in the thickness of the printing metal mask plate. Things. However, in this case, the depth of the recess for mounting component escape is limited to the thickness of the metal mask plate for printing, so the height of the primary mounting component is limited,
To obtain a deeper recess for mounting component escape, the thickness of the printing metal mask plate must be increased.If the printing metal mask plate is made thicker, the printing thickness becomes unnecessarily thick. There is a problem that cannot be set.

【0003】こうした問題点を解消するものとして、特
開平2−122993号公報に開示されているように導
電性インキやクリーム半田ペースト(以下、インキ・ぺ
ーストという。)などを吐出すための多数の開孔を有す
る印刷用メタルマスク版の一部をプレス加工で絞り成形
することにより、1次実装部品逃げ用凹部を形成するも
のがある。これによれば、版厚以上の厚みや高さを持つ
1次実装部品からも逃げられる1次実装部品逃げ用凹部
をも形成することができて有利である。
In order to solve such problems, as disclosed in Japanese Patent Application Laid-Open No. 2-129993, a large number of inks for discharging conductive ink or cream solder paste (hereinafter referred to as ink paste) are used. There is a method in which a part of a printing metal mask plate having the above-mentioned opening is formed by drawing by press working to form a recess for escaping a primary mounted component. According to this, it is possible to form a primary mounting component escape concave portion that can escape from a primary mounting component having a thickness or height greater than the plate thickness.

【0004】[0004]

【発明が解決しようとする課題】しかるに、印刷用メタ
ルマスク版の一部をプレスで絞り成形して1次実装部品
逃げ用凹部を形成する方法では、その絞り成形時に1次
実装部品逃げ用凹部の周辺が伸び縮みするため、その近
傍に位置する開孔に変形を加えたり、位置ずれを起こ
し、精度の低下を招きやすかった。
However, in a method of forming a recess for escaping a primary mounting component by drawing a part of a metal mask plate for printing by pressing with a press, a recess for escaping a primary mounting component during the drawing is used. Since the periphery of the hole expands and contracts, the opening located in the vicinity thereof is deformed or misaligned, which tends to cause a decrease in accuracy.

【0005】本発明の目的は、電鋳により、特に電鋳母
型の形状に工夫を凝らすことにより版厚よりも深い深さ
を持つ1次実装部品逃げ用凹部の形成をも可能にしなが
ら高精度に製造することのできる印刷用メタルマスク版
の製造方法を提供せんとする。
An object of the present invention is to make it possible to form a recess for escaping a primary mounting component having a depth greater than the plate thickness by electroforming, particularly by devising the shape of an electroformed mold. A method of manufacturing a metal mask plate for printing that can be manufactured with high precision is not provided.

【0006】[0006]

【課題を解決するための手段】本発明の印刷用メタルマ
スク版の製造方法は、図示例のように、電鋳母型10の
表面に所望の開孔パターンのレジスト膜13を形成する
とともに、1次実装部品逃げ用凹部3に対応する導電性
凸部14を形成する。そして、その電鋳母型10のレジ
スト膜13で覆われていない表面に電鋳により基板1を
形成する。この後、電鋳母型10から基板1を剥離する
ものである。
According to a method of manufacturing a metal mask plate for printing of the present invention, a resist film 13 having a desired opening pattern is formed on the surface of an electroforming mold 10 as shown in the drawing. The conductive convex portions 14 corresponding to the primary mounting component escape concave portions 3 are formed. Then, the substrate 1 is formed by electroforming on the surface of the electroformed matrix 10 that is not covered with the resist film 13. Thereafter, the substrate 1 is peeled from the electroformed mold 10.

【0007】[0007]

【作用】上記電鋳により高精度の1次実装部品逃げ用凹
部3および開孔2を有する印刷用メタルマスク版を得
る。1次実装部品逃げ用凹部3は、電鋳母型10の導電
性凸部14の外形に沿って電着形成されるので、前述し
た従来のようにプレスで1次実装部品逃げ用凹部を形成
するもののごときこれの近傍の開孔2に変形や位置ずれ
を加えるといったおそれがない。
According to the above-mentioned electroforming, a printing metal mask plate having a recess 3 and an opening 2 for escaping a primary mounting component with high precision is obtained. Since the primary mounting component escape concave portion 3 is formed by electrodeposition along the outer shape of the conductive convex portion 14 of the electroformed matrix 10, the primary mounting component escape concave portion is formed by pressing as in the conventional case described above. However, there is no fear that the opening 2 in the vicinity thereof is deformed or misaligned.

【0008】[0008]

【発明の効果】従って本発明によれば、電鋳母型10の
表面に所望の開孔パターンのレジスト膜13を形成する
とともに1次実装部品逃げ用凹部3に対応する導電性凸
部14を形成した後、電鋳することにより1次実装部品
逃げ用凹部3および開孔2を有する印刷用メタルマスク
版を高精度にかつ簡単に製造できる。電鋳母型10の導
電性凸部14の高さや外形を調整することにより1次実
装部品の厚み、高さ、形に対応した各種の1次実装部品
逃げ用凹部3を形成することができる。この高精度な印
刷用メタルマスク版を用いることにより、精密な印刷を
可能にする。
Therefore, according to the present invention, a resist film 13 having a desired opening pattern is formed on the surface of the electroformed mold 10 and the conductive protrusions 14 corresponding to the recesses 3 for escaping the primary mounting component are formed. After forming, a metal mask plate for printing having the recessed portion 3 for escaping the primary mounting component and the opening 2 can be manufactured with high precision and easily by electroforming. By adjusting the height and outer shape of the conductive projections 14 of the electroformed mold 10, various primary mounting component escape recesses 3 corresponding to the thickness, height, and shape of the primary mounting component can be formed. . The use of this high-precision metal mask plate for printing enables precise printing.

【0009】[0009]

【実施例】本発明の一実施例を図面に基づき説明する。
図3は本発明の対象とする印刷用メタルマスク版の使用
態様例を示し、同図に該メタルマスク版の一部の断面形
状が示されるようにその基板1にインキ・ぺースト吐出
し用の開孔2と1次実装部品逃げ用凹部3とを形成して
いる。4は既に1次実装部品5を搭載したプリント配線
板、6はスキージで、2次実装工程で印刷用メタルマス
ク版上にのせたインキ・ぺースト7を掻くためのもので
ある。
An embodiment of the present invention will be described with reference to the drawings.
FIG. 3 shows an example of usage of a printing metal mask plate to which the present invention is applied. As shown in FIG. And the recess 3 for escaping the primary mounting component. Reference numeral 4 denotes a printed wiring board on which the primary mounting components 5 are already mounted, and reference numeral 6 denotes a squeegee for scraping the ink paste 7 placed on the printing metal mask plate in the secondary mounting process.

【0010】図2(A)ないし(F)はその印刷用メタ
ルマスク版を電鋳で得るまでの工程を示す。先ず、図2
の(A)に示すようにこの電鋳に使用されるステンレス
(SUS304)製の電鋳母型10の表面にフィルム状
のホトレジスト11をラミネートする。次いで、同図の
(B)に示すように表面側のホトレジスト11の上に所
望のの開孔パターンフィルム12を密着させ、焼き付
け、現像、乾燥の各処理を行って、同図の(C)に示す
ように所望開孔パターンのレジスト膜13(例えば、2
00μ厚)を形成する。
FIGS. 2A to 2F show steps until the metal mask plate for printing is obtained by electroforming. First, FIG.
As shown in (A), a film-shaped photoresist 11 is laminated on the surface of an electroformed mold 10 made of stainless steel (SUS304) used for this electroforming. Next, as shown in FIG. 3B, a desired aperture pattern film 12 is brought into close contact with the photoresist 11 on the front side, and each processing such as baking, development and drying is performed. As shown in FIG. 2, a resist film 13 having a desired opening pattern (for example, 2
00 μm).

【0011】次いで、同図の(D)に示すように、電鋳
母型10の表面の所定位置に、所望の1次実装部品5の
高さや形状に対応する導電性凸部14(例えば、高さh
=1.5 〜2.0 mm)を所定位置に形成する。この導電性凸
部14の形成に際しては、例えば、図4の(A)に示す
ように、1次実装部品5の高さや形状に対応して形成さ
れた、例えばSUS304などの導電性を有する金属板
15を、電鋳母型10の表面上の所定位置に重ね、その
数カ所にねじ16を通し、電鋳母型10の裏面側におい
てナット17で締めつけて固着する。次いで、同図の
(B)に示すように金属板15のねじ16の頭が露出す
る表面側には銅ペーストなどの導電性ペースト19を均
一に塗布してフラットに仕上げる。この場合、図5に示
すように予め金属板15にねじ16をセットするととも
に導電性ペースト19を塗布しておき、しかるのちこれ
を電鋳母型10に固着することもできる。そのほかに、
クラッド法などにより電鋳母型10の表面に金属板15
を接着または溶接によって一体に合わせることもでき
る。
Next, as shown in FIG. 1D, a conductive convex portion 14 (for example, a conductive convex portion 14 corresponding to a desired height and shape of the primary mounting component 5 is provided at a predetermined position on the surface of the electroformed mold 10. Height h
= 1.5-2.0 mm) at predetermined positions. In forming the conductive protrusions 14, for example, as shown in FIG. 4A, a conductive metal such as SUS304 formed corresponding to the height and shape of the primary mounting component 5 is used. The plate 15 is placed at a predetermined position on the surface of the electroformed mold 10, screws 16 are passed through several places thereof, and the plate 15 is fastened and fixed with a nut 17 on the back side of the electroformed mold 10. Next, as shown in FIG. 3B, a conductive paste 19 such as a copper paste is uniformly applied to the surface of the metal plate 15 where the heads of the screws 16 are exposed, to finish it flat. In this case, as shown in FIG. 5, it is also possible to set the screw 16 on the metal plate 15 in advance and apply the conductive paste 19, and then fix it to the electroformed mold 10. Besides that,
A metal plate 15 is formed on the surface of the electroformed mold 10 by a cladding method or the like.
Can be joined together by bonding or welding.

【0012】次いで、このようにレジスト膜13および
導電性凸部14を有する電鋳母型10を光沢または無光
沢のスルファミン酸ニッケル−コバルト合金浴に浸漬し
て電鋳を行うことにより、図2の(E)に示すように電
鋳母型10および導電性凸部14の表面に約15〜25
μ厚の電着金属層25を形成する。ただし、この工程は
必ずしも必要とするものではない。
Next, the electroforming mold 10 having the resist film 13 and the conductive projections 14 is immersed in a glossy or matte nickel-cobalt sulfamate alloy bath to perform electroforming, as shown in FIG. As shown in (E) of FIG.
A μ-thick electrodeposited metal layer 25 is formed. However, this step is not always necessary.

【0013】次いで、電着金属層25の表面に剥離処理
を施した後、スルファミン酸ニッケル−コバルト合金浴
に浸漬して約200μの厚さで電鋳を行う。これによ
り、同図の(F)に示すように電鋳母型10のレジスト
膜13で覆われていない表面に基板1が電着形成され
る。このとき基板1は導電性凸部14の外形に沿って膨
出する形の凸部20を形成し、この凸部20の内面側に
1次実装部品逃げ用凹部3が形成される。電鋳後、その
基板1は表面研摩される。
Next, after the surface of the electrodeposited metal layer 25 is subjected to a release treatment, it is immersed in a nickel-cobalt sulfamate alloy bath and electroformed to a thickness of about 200 μm. As a result, the substrate 1 is electrodeposited on the surface of the electroforming mold 10 not covered with the resist film 13 as shown in FIG. At this time, the substrate 1 forms a convex portion 20 bulging along the outer shape of the conductive convex portion 14, and the concave portion 3 for escaping the primary mounting component is formed on the inner surface side of the convex portion 20. After electroforming, the substrate 1 is polished.

【0014】最後に、基板1を電着金属層25の剥離処
理面から剥離することにより、同図の(G)に示すよう
に基板1に開孔2および1.5〜2.0mm深さの1次実装部
品逃げ用凹部3を有する印刷用メタルマスク版の電鋳製
品を得る。
Finally, the substrate 1 is peeled from the peeled surface of the electrodeposited metal layer 25, so that the substrate 1 has an opening 2 and a depth of 1.5 to 2.0 mm as shown in FIG. To obtain an electroformed product of a printing metal mask plate having the recessed portion 3 for escaping the primary mounting component.

【0015】上記ニッケル−コバルト合金浴に代えて、
ニッケル電鋳浴にイオウ系添加剤(スルフォン酸基を持
った芳香族)、例えばナフタレン・トリスルフォン酸ソ
ーダやベンゼン・スルフォン酸ナトリウム等を加えたも
のを使用することで、若干圧縮応力側にメッキ液を調整
する。この浴で電鋳加工された印刷用メタルマスク版は
全体的な伸びを持って形成され、若干開孔パターンフィ
ルム12のピッチ寸法よりも大きめに出来上がる。その
ため、高精度なピッチを要求されるものや、印刷用メタ
ルマスク版が大型サイズで多数個のパターンが配置され
るものなどピッチ間距離が異常に長いものにあっては、
予め開孔パターンフィルム12に補正値を入れておく。
例えば、印刷用メタルマスク版のサイズが360×36
0mmで、開孔パターンフィルム12のピッチ寸法100
mmに対し印刷用メタルマスク版(電鋳製品)寸法が10
0.025〜100.035mm伸びる。従って、このときの
開孔パターンフィルム12の補正値(補正後のパターン
寸法)は設計値÷1.0003に設定する。また、印刷用
メタルマスク版のサイズが460×460mmまたは56
0×560mmで、開孔パターンフィルム12のピッチ寸
法100mmに対し電鋳製品たる印刷用メタルマスク版
(電鋳製品)寸法が100.045〜100.055mm伸び
る。従って、このときの開孔パターンフィルム12の補
正値は設計値÷1.0005に設定すればよい。
Instead of the nickel-cobalt alloy bath,
Plating slightly on the compressive stress side by using a nickel electroforming bath containing a sulfur-based additive (aromatic having a sulfonate group), such as sodium naphthalene / trisulfonate or sodium benzene / sulfonate Adjust the liquid. The printing metal mask plate electroformed in this bath is formed with an overall elongation, and is slightly larger than the pitch dimension of the aperture pattern film 12. Therefore, if the pitch between the pitches is abnormally long, such as those requiring a high-precision pitch, or those in which a metal mask plate for printing is large and many patterns are arranged,
A correction value is put in the aperture pattern film 12 in advance.
For example, the size of the metal mask plate for printing is 360 × 36
0 mm, the pitch of the aperture pattern film 12 is 100 mm.
The size of the metal mask plate for printing (electroformed product) is 10 mm
It extends from 0.025 to 100.35 mm. Therefore, the correction value (pattern size after correction) of the aperture pattern film 12 at this time is set to the design value ÷ 1.0003. In addition, the size of the metal mask plate for printing is 460 × 460 mm or 56
The dimension of the metal mask plate (electroformed product) for printing as an electroformed product is 100.045 to 100.055 mm, which is 0 × 560 mm and the pitch size of the aperture pattern film 12 is 100 mm. Therefore, the correction value of the aperture pattern film 12 at this time may be set to the design value ÷ 1.0005.

【0016】これに対しニッケル−コバルト合金浴では
若干引張応力側にメッキ液が調整されるが、この場合は
電鋳母型10に基板1が付いた状態でその基板1の表面
を研磨する際、電鋳母型10に対して基板1の剥がれや
反りが生じやすく、研磨精度が出なくなるといった問題
が生じる。しかし、ニッケル電鋳浴にイオウ系添加剤を
加えたものを使用することで若干圧縮応力側にメッキ液
を調整しておくと、かかる問題は生じるようなことがな
くて有利である。
On the other hand, in the nickel-cobalt alloy bath, the plating solution is slightly adjusted to the tensile stress side. In this case, when the surface of the substrate 1 is polished while the substrate 1 is attached to the electroforming mold 10. In addition, there is a problem that the substrate 1 is easily peeled or warped with respect to the electroformed mold 10 and polishing accuracy is not improved. However, if a plating solution is slightly adjusted to a compressive stress side by using a nickel electroforming bath to which a sulfur-based additive is added, such a problem does not occur, which is advantageous.

【0017】電鋳母型10の表面に導電性凸部14を形
成する手段としては、上記したごとき金属板15を重合
固着するに代えて、図7に示すように平らな電鋳母型1
0それ自体をプレス加工することにより形成することも
できる。図7の(A)ないし(E)はプレス加工により
導電性凸部14を電鋳母型10の表面に形成し、この母
型10を用いて印刷用メタルマスク版を上記実施例と同
様に電鋳する実施例を示す。
As a means for forming the conductive protrusions 14 on the surface of the electroformed mold 10, instead of fixing the metal plate 15 by polymerization as described above, a flat electroformed mold 1 as shown in FIG.
0 can be formed by pressing itself. 7 (A) to 7 (E), a conductive convex portion 14 is formed on the surface of the electroformed master 10 by press working, and a metal mask plate for printing is formed using the master 10 in the same manner as in the above embodiment. An example of electroforming will be described.

【0018】すなわち、まず、図7の(A)に示すよう
に上下のプレス型21・22間に、所定厚、例えば1.5
mm厚の、SUS304製の電鋳母型10をはさみ、プレ
ス加工することにより、同図の(B)に示すように1次
実装部品の高さや形状に応じた、例えば1.5mm高さの導
電性凸部14を形成する。
That is, first, as shown in FIG. 7A, a predetermined thickness, for example, 1.5, is provided between the upper and lower press dies 21 and 22.
The SUS304 electroformed mold 10 having a thickness of 1 mm is sandwiched and pressed to form, for example, a 1.5 mm height according to the height and shape of the primary mounting component as shown in FIG. The conductive protrusions 14 are formed.

【0019】次いで、同図の(C)に示すように電鋳母
型10の導電性凸部14を形成した表面に、所望の開孔
パターンのレジスト膜13を形成したうえで、同図の
(D)に示すように電鋳母型10のレジスト膜13で覆
われていない表面に電鋳により基板1を、例えば200
μの厚さに電着形成する。電鋳後、表面を研磨した後、
基板1を電鋳母型10から剥離することにより、同図の
(E)に示すように基板1に開孔2および約1.5mmの深
さの1次実装部品逃げ用凹部3を有する印刷用メタルマ
スク版を得る。
Next, as shown in FIG. 2C, a resist film 13 having a desired opening pattern is formed on the surface of the electroformed mold 10 on which the conductive projections 14 are formed. As shown in (D), the substrate 1 is formed by electroforming on the surface of the electroforming mold 10 which is not covered with the resist film 13, for example, 200
Electrodeposit to a thickness of μ. After electroforming, after polishing the surface,
By peeling the substrate 1 from the electroforming mold 10, the substrate 1 is provided with an opening 2 and a recess 3 for escaping a primary mounting component having a depth of about 1.5 mm as shown in FIG. To obtain a metal mask plate.

【0020】この実施例では、電鋳母型10をプレス加
工により導電性凸部14を形成した後、所望の開孔パタ
ーンのレジスト膜13をパターンニング形成したが、こ
れに代えて図8の(A)に示すように電鋳母型10の表
面に所望の開孔パターンのレジスト膜13をパターンニ
ング形成したのち、電鋳母型10をプレス加工して導電
性凸部14を形成することもできる。この後、その母型
10を用いて電鋳することにより基板1を形成し(同図
の(C)参照)、電鋳後表面研磨して電鋳母型10から
基板1を剥離することは、上記実施例の場合と同様であ
る。
In this embodiment, after the electroforming mold 10 is formed with the conductive convex portions 14 by press working, the resist film 13 having a desired opening pattern is formed by patterning. As shown in FIG. 1A, after a resist film 13 having a desired opening pattern is formed on the surface of the electroformed master 10 by patterning, the electroformed master 10 is pressed to form a conductive convex portion 14. Can also. Thereafter, the substrate 1 is formed by electroforming using the matrix 10 (see (C) in the same figure), and the surface is polished after electroforming to peel the substrate 1 from the electroformed matrix 10. This is the same as in the above embodiment.

【0021】図9は、電鋳母型10の表面に導電性凸部
14およびレジスト膜13を形成する他の実施例を示
す。この実施例では、まず、同図の(A)に示すように
電鋳母型10の表面にエッチングにより僅かな深さの凹
部24を形成する。次いで、同図の(B)に示すように
電鋳母型10の表面に所望の開孔パターンのレジスト膜
13をパターンニング形成する。次いで、同図の(C)
に示すように電鋳母型10の表面の凹部24に導電金属
板からなる導電性凸部14を嵌め込み、同図の(D)の
ようにその導電性凸部14をねじ16およびナット17
などで止め付ける。このように導電金属板からなる導電
性凸部14が電鋳母型10の凹部24に嵌め込み固定さ
れることでその導電性凸部14の位置ずれを防止できる
とともに密着性を向上できる。
FIG. 9 shows another embodiment in which the conductive protrusions 14 and the resist film 13 are formed on the surface of the electroformed mold 10. In this embodiment, first, a recess 24 having a slight depth is formed on the surface of the electroformed mold 10 by etching as shown in FIG. Next, a resist film 13 having a desired opening pattern is formed on the surface of the electroformed mold 10 by patterning as shown in FIG. Next, FIG.
As shown in FIG. 3, a conductive convex portion 14 made of a conductive metal plate is fitted into a concave portion 24 on the surface of the electroformed mold 10, and the conductive convex portion 14 is screwed into a screw 16 and a nut 17 as shown in FIG.
Stop with. In this manner, the conductive protrusions 14 made of the conductive metal plate are fitted and fixed in the recesses 24 of the electroformed mother mold 10, so that the position shift of the conductive protrusions 14 can be prevented and the adhesion can be improved.

【0022】上記電鋳母型10の材料としてはSUS3
04以外のステンレスや銅などであってもよい。電鋳母
型10の材料として銅を選択すれば、プレス加工の際展
性が良く導電性凸部14を形成し易くて有利である。
The material of the electroformed mold 10 is SUS3
Stainless steel or copper other than 04 may be used. If copper is selected as the material of the electroformed mold 10, it is advantageous because the conductive convex portions 14 can be easily formed at the time of press working with good spreadability.

【0023】なお、図6のように1次実装部品逃げ用凹
部3が方向性を持つ場合は、スキージ6に1次実装部品
逃げ用凹部3を有する凸部20の外形に応じた凹部23
を設け、印刷に際しその1次実装部品逃げ用凹部3の長
手方向に沿うY方向にスキージ6を往復させればよい。
When the primary mounting component escape recess 3 has a directionality as shown in FIG. 6, the squeegee 6 has a recess 23 corresponding to the outer shape of the projection 20 having the primary mounting component escape recess 3.
In printing, the squeegee 6 may be reciprocated in the Y direction along the longitudinal direction of the primary mounting component escape recess 3.

【図面の簡単な説明】[Brief description of the drawings]

【図1】主要な製造工程図である。FIG. 1 is a main manufacturing process diagram.

【図2】全体の製造工程図である。FIG. 2 is an overall manufacturing process diagram.

【図3】印刷用メタルマスク版の使用態様例を示す断面
図である。
FIG. 3 is a cross-sectional view showing an example of usage of a metal mask plate for printing.

【図4】電鋳母型に凸部を形成する手段の一例を示すそ
の形成過程図である。
FIG. 4 is a diagram showing a forming process of an example of a means for forming a convex portion on an electroformed mold.

【図5】図4に示す金属板の他の変形例を示す断面図で
ある。
FIG. 5 is a sectional view showing another modification of the metal plate shown in FIG.

【図6】スキージのかけ方向態様例を示す斜視図であ
る。
FIG. 6 is a perspective view showing an example of a squeegee hanging direction.

【図7】他の実施例を示す製造工程図である。FIG. 7 is a manufacturing process diagram showing another embodiment.

【図8】更に他の実施例を示す製造工程図である。FIG. 8 is a manufacturing process diagram showing still another embodiment.

【図9】更に又、電鋳母型に導電性凸部を形成する他の
実施例を示す工程図である。
FIG. 9 is a process drawing showing still another embodiment of forming a conductive projection on an electroformed mold.

【符号の説明】1 基板 2 開孔 3 1次実装部品逃げ用凹部 10 電鋳母型 13 レジスト膜 14 導電性凸部 [Description of Signs ] 1 Substrate 2 Opening 3 Primary mounting component escape recess 10 Electroforming mold 13 Resist film 14 Conductive projection

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平2−122993(JP,A) 特開 昭53−36303(JP,A) 特開 昭50−110070(JP,A) 実開 昭63−11856(JP,U) 特公 昭57−1824(JP,B2) (58)調査した分野(Int.Cl.7,DB名) B41C 1/14 101 B41N 1/24 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-122993 (JP, A) JP-A-53-36303 (JP, A) JP-A-50-110070 (JP, A) 11856 (JP, U) JP-B-57-1824 (JP, B2) (58) Fields investigated (Int. Cl. 7 , DB name) B41C 1/14 101 B41N 1/24

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 基板1に所望の印刷パターンにパターン
ニング形成されたインキ・ぺースト吐出し用の開孔2お
よび1次実装部品逃げ用凹部3を有する印刷用メタルマ
スク版を製造するに際し、 電鋳母型10の表面に所望の開孔パターンのレジスト膜
13を形成するとともに、1次実装部品逃げ用凹部3に
対応する導電性凸部14を形成し、この電鋳母型10の
レジスト膜13で覆われていない表面に電鋳により基板
1を形成し、 この後、電鋳母型10から基板1を剥離することを特徴
とする印刷用メタルマスク版の製造方法。
When manufacturing a printing metal mask plate having an opening for discharging ink paste and a recess for escaping a primary mounting component, the printing paste is formed on a substrate by patterning a desired printing pattern. A resist film 13 having a desired opening pattern is formed on the surface of the electroformed mold 10, and a conductive convex portion 14 corresponding to the recess 3 for escaping the primary mounting component is formed. A method for manufacturing a metal mask plate for printing, comprising: forming a substrate 1 by electroforming on a surface not covered with a film 13; and thereafter peeling the substrate 1 from an electroformed matrix 10.
JP04073376A 1992-02-24 1992-02-24 Manufacturing method of metal mask plate for printing Expired - Fee Related JP3120130B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04073376A JP3120130B2 (en) 1992-02-24 1992-02-24 Manufacturing method of metal mask plate for printing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04073376A JP3120130B2 (en) 1992-02-24 1992-02-24 Manufacturing method of metal mask plate for printing

Publications (2)

Publication Number Publication Date
JPH0692053A JPH0692053A (en) 1994-04-05
JP3120130B2 true JP3120130B2 (en) 2000-12-25

Family

ID=13516408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04073376A Expired - Fee Related JP3120130B2 (en) 1992-02-24 1992-02-24 Manufacturing method of metal mask plate for printing

Country Status (1)

Country Link
JP (1) JP3120130B2 (en)

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Also Published As

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