JPH0623570Y2 - プラズマ発生装置 - Google Patents
プラズマ発生装置Info
- Publication number
- JPH0623570Y2 JPH0623570Y2 JP10998588U JP10998588U JPH0623570Y2 JP H0623570 Y2 JPH0623570 Y2 JP H0623570Y2 JP 10998588 U JP10998588 U JP 10998588U JP 10998588 U JP10998588 U JP 10998588U JP H0623570 Y2 JPH0623570 Y2 JP H0623570Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- microwave
- plasma
- wave circuit
- slow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003989 dielectric material Substances 0.000 claims description 5
- 238000004381 surface treatment Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998588U JPH0623570Y2 (ja) | 1988-08-24 | 1988-08-24 | プラズマ発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998588U JPH0623570Y2 (ja) | 1988-08-24 | 1988-08-24 | プラズマ発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233261U JPH0233261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-01 |
| JPH0623570Y2 true JPH0623570Y2 (ja) | 1994-06-22 |
Family
ID=31346731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998588U Expired - Lifetime JPH0623570Y2 (ja) | 1988-08-24 | 1988-08-24 | プラズマ発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623570Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0627871A (ja) * | 1992-07-06 | 1994-02-04 | Mitsuru Ito | 自動車の運転操作練習台 |
-
1988
- 1988-08-24 JP JP10998588U patent/JPH0623570Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0233261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-01 |