JPH062272Y2 - ウェーハ容器の上部緩衝板 - Google Patents
ウェーハ容器の上部緩衝板Info
- Publication number
- JPH062272Y2 JPH062272Y2 JP2423788U JP2423788U JPH062272Y2 JP H062272 Y2 JPH062272 Y2 JP H062272Y2 JP 2423788 U JP2423788 U JP 2423788U JP 2423788 U JP2423788 U JP 2423788U JP H062272 Y2 JPH062272 Y2 JP H062272Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- buffer plate
- elastic
- upper buffer
- pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 45
- 238000011109 contamination Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 235000002597 Solanum melongena Nutrition 0.000 description 1
- 244000061458 Solanum melongena Species 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423788U JPH062272Y2 (ja) | 1988-02-25 | 1988-02-25 | ウェーハ容器の上部緩衝板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423788U JPH062272Y2 (ja) | 1988-02-25 | 1988-02-25 | ウェーハ容器の上部緩衝板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01129836U JPH01129836U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-09-04 |
| JPH062272Y2 true JPH062272Y2 (ja) | 1994-01-19 |
Family
ID=31243919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2423788U Expired - Lifetime JPH062272Y2 (ja) | 1988-02-25 | 1988-02-25 | ウェーハ容器の上部緩衝板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062272Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2023233554A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 2022-05-31 | 2023-12-07 | ||
| WO2024252672A1 (ja) * | 2023-06-09 | 2024-12-12 | ミライアル株式会社 | 基板収納容器 |
-
1988
- 1988-02-25 JP JP2423788U patent/JPH062272Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01129836U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-09-04 |