JPH062262Y2 - 基板の冷却装置 - Google Patents
基板の冷却装置Info
- Publication number
- JPH062262Y2 JPH062262Y2 JP1986139555U JP13955586U JPH062262Y2 JP H062262 Y2 JPH062262 Y2 JP H062262Y2 JP 1986139555 U JP1986139555 U JP 1986139555U JP 13955586 U JP13955586 U JP 13955586U JP H062262 Y2 JPH062262 Y2 JP H062262Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling plate
- discharge tank
- substrate
- constant temperature
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 title claims description 69
- 239000000758 substrate Substances 0.000 title claims description 40
- 239000007788 liquid Substances 0.000 claims description 25
- 238000007599 discharging Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 239000003507 refrigerant Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 3
- 230000003292 diminished effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986139555U JPH062262Y2 (ja) | 1986-09-10 | 1986-09-10 | 基板の冷却装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986139555U JPH062262Y2 (ja) | 1986-09-10 | 1986-09-10 | 基板の冷却装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6346840U JPS6346840U (enrdf_load_stackoverflow) | 1988-03-30 |
| JPH062262Y2 true JPH062262Y2 (ja) | 1994-01-19 |
Family
ID=31045572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986139555U Expired - Lifetime JPH062262Y2 (ja) | 1986-09-10 | 1986-09-10 | 基板の冷却装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062262Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176936A (ja) * | 1982-04-09 | 1983-10-17 | Fujitsu Ltd | 基板冷却方法 |
| JPS59149630U (ja) * | 1983-03-25 | 1984-10-06 | 株式会社日立製作所 | ウエハ処理電極 |
-
1986
- 1986-09-10 JP JP1986139555U patent/JPH062262Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6346840U (enrdf_load_stackoverflow) | 1988-03-30 |
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