JPH062202Y2 - 電子銃装置 - Google Patents
電子銃装置Info
- Publication number
- JPH062202Y2 JPH062202Y2 JP6309888U JP6309888U JPH062202Y2 JP H062202 Y2 JPH062202 Y2 JP H062202Y2 JP 6309888 U JP6309888 U JP 6309888U JP 6309888 U JP6309888 U JP 6309888U JP H062202 Y2 JPH062202 Y2 JP H062202Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- electron gun
- electron
- evaporated
- beam sweep
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 12
- 238000004804 winding Methods 0.000 claims description 7
- 238000005524 ceramic coating Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 238000010408 sweeping Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6309888U JPH062202Y2 (ja) | 1988-05-13 | 1988-05-13 | 電子銃装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6309888U JPH062202Y2 (ja) | 1988-05-13 | 1988-05-13 | 電子銃装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01166954U JPH01166954U (enrdf_load_stackoverflow) | 1989-11-22 |
| JPH062202Y2 true JPH062202Y2 (ja) | 1994-01-19 |
Family
ID=31288627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6309888U Expired - Lifetime JPH062202Y2 (ja) | 1988-05-13 | 1988-05-13 | 電子銃装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062202Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-05-13 JP JP6309888U patent/JPH062202Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01166954U (enrdf_load_stackoverflow) | 1989-11-22 |
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