JPH06216254A - 自己整合垂直アンチフューズ - Google Patents

自己整合垂直アンチフューズ

Info

Publication number
JPH06216254A
JPH06216254A JP5317788A JP31778893A JPH06216254A JP H06216254 A JPH06216254 A JP H06216254A JP 5317788 A JP5317788 A JP 5317788A JP 31778893 A JP31778893 A JP 31778893A JP H06216254 A JPH06216254 A JP H06216254A
Authority
JP
Japan
Prior art keywords
layer
amorphous silicon
integrated circuit
antifuse
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5317788A
Other languages
English (en)
Japanese (ja)
Inventor
David P Favreau
ポール ファブロー ディヴィッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Publication of JPH06216254A publication Critical patent/JPH06216254A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5252—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5317788A 1992-12-17 1993-12-17 自己整合垂直アンチフューズ Withdrawn JPH06216254A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US99179092A 1992-12-17 1992-12-17
US991790 1992-12-17

Publications (1)

Publication Number Publication Date
JPH06216254A true JPH06216254A (ja) 1994-08-05

Family

ID=25537569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5317788A Withdrawn JPH06216254A (ja) 1992-12-17 1993-12-17 自己整合垂直アンチフューズ

Country Status (4)

Country Link
US (1) US5412245A (enExample)
EP (1) EP0602836A1 (enExample)
JP (1) JPH06216254A (enExample)
TW (1) TW232091B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008147640A (ja) * 2006-11-17 2008-06-26 Semiconductor Energy Lab Co Ltd 半導体装置および半導体装置の作製方法

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5614756A (en) 1990-04-12 1997-03-25 Actel Corporation Metal-to-metal antifuse with conductive
US5272101A (en) * 1990-04-12 1993-12-21 Actel Corporation Electrically programmable antifuse and fabrication processes
US5780323A (en) 1990-04-12 1998-07-14 Actel Corporation Fabrication method for metal-to-metal antifuses incorporating a tungsten via plug
US5552627A (en) * 1990-04-12 1996-09-03 Actel Corporation Electrically programmable antifuse incorporating dielectric and amorphous silicon interlayers
EP0558176A1 (en) * 1992-02-26 1993-09-01 Actel Corporation Metal-to-metal antifuse with improved diffusion barrier layer
US5308795A (en) * 1992-11-04 1994-05-03 Actel Corporation Above via metal-to-metal antifuse
US6690044B1 (en) * 1993-03-19 2004-02-10 Micron Technology, Inc. Approach to avoid buckling BPSG by using an intermediate barrier layer
JP3170101B2 (ja) * 1993-04-15 2001-05-28 株式会社東芝 半導体装置及びその製造方法
US5369054A (en) * 1993-07-07 1994-11-29 Actel Corporation Circuits for ESD protection of metal-to-metal antifuses during processing
US5581111A (en) * 1993-07-07 1996-12-03 Actel Corporation Dielectric-polysilicon-dielectric antifuse for field programmable logic applications
US5485031A (en) 1993-11-22 1996-01-16 Actel Corporation Antifuse structure suitable for VLSI application
US5789764A (en) * 1995-04-14 1998-08-04 Actel Corporation Antifuse with improved antifuse material
EP0774164A1 (en) 1995-06-02 1997-05-21 Actel Corporation Raised tungsten plug antifuse and fabrication process
US5986322A (en) * 1995-06-06 1999-11-16 Mccollum; John L. Reduced leakage antifuse structure
US5741720A (en) * 1995-10-04 1998-04-21 Actel Corporation Method of programming an improved metal-to-metal via-type antifuse
US5602053A (en) * 1996-04-08 1997-02-11 Chartered Semidconductor Manufacturing Pte, Ltd. Method of making a dual damascene antifuse structure
US10714422B2 (en) 2018-10-16 2020-07-14 Globalfoundries Inc. Anti-fuse with self aligned via patterning
US10892222B1 (en) 2019-09-04 2021-01-12 Globalfoundries Inc. Anti-fuse for an integrated circuit (IC) product and method of making such an anti-fuse for an IC product
US10957701B1 (en) 2019-11-11 2021-03-23 Globalfoundries U.S. Inc. Fin-based anti-fuse device for integrated circuit (IC) products, methods of making such an anti-fuse device and IC products comprising such an anti-fuse device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543480A (en) * 1977-06-09 1979-01-11 Fujitsu Ltd Manufacture of semiconductor device
JPS5720463A (en) * 1980-07-14 1982-02-02 Toshiba Corp Semiconductor memory device
JPH0656876B2 (ja) * 1984-12-28 1994-07-27 富士通株式会社 半導体装置
US4949084A (en) * 1985-10-29 1990-08-14 Ohio Associated Enterprises, Inc. Programmable integrated crosspoint switch
US5134457A (en) * 1986-05-09 1992-07-28 Actel Corporation Programmable low-impedance anti-fuse element
US4943538A (en) * 1986-05-09 1990-07-24 Actel Corporation Programmable low impedance anti-fuse element
JPH01184942A (ja) * 1988-01-20 1989-07-24 Toshiba Corp トリミング素子とその電気短絡方法
US5404029A (en) * 1990-04-12 1995-04-04 Actel Corporation Electrically programmable antifuse element
US5100827A (en) * 1991-02-27 1992-03-31 At&T Bell Laboratories Buried antifuse
US5126290A (en) * 1991-09-11 1992-06-30 Micron Technology, Inc. Method of making memory devices utilizing one-sided ozone teos spacers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008147640A (ja) * 2006-11-17 2008-06-26 Semiconductor Energy Lab Co Ltd 半導体装置および半導体装置の作製方法
US8759946B2 (en) 2006-11-17 2014-06-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101416876B1 (ko) * 2006-11-17 2014-07-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제조방법

Also Published As

Publication number Publication date
EP0602836A1 (en) 1994-06-22
TW232091B (enExample) 1994-10-11
US5412245A (en) 1995-05-02

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Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20010306