TW232091B - - Google Patents

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Publication number
TW232091B
TW232091B TW082110024A TW82110024A TW232091B TW 232091 B TW232091 B TW 232091B TW 082110024 A TW082110024 A TW 082110024A TW 82110024 A TW82110024 A TW 82110024A TW 232091 B TW232091 B TW 232091B
Authority
TW
Taiwan
Prior art keywords
layer
amorphous silicon
fan
application
barrier material
Prior art date
Application number
TW082110024A
Other languages
English (en)
Chinese (zh)
Original Assignee
American Telephone & Telegraph
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone & Telegraph filed Critical American Telephone & Telegraph
Application granted granted Critical
Publication of TW232091B publication Critical patent/TW232091B/zh

Links

Classifications

    • H10W20/491—

Landscapes

  • Design And Manufacture Of Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW082110024A 1992-12-17 1993-11-27 TW232091B (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US99179092A 1992-12-17 1992-12-17

Publications (1)

Publication Number Publication Date
TW232091B true TW232091B (enExample) 1994-10-11

Family

ID=25537569

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082110024A TW232091B (enExample) 1992-12-17 1993-11-27

Country Status (4)

Country Link
US (1) US5412245A (enExample)
EP (1) EP0602836A1 (enExample)
JP (1) JPH06216254A (enExample)
TW (1) TW232091B (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5552627A (en) * 1990-04-12 1996-09-03 Actel Corporation Electrically programmable antifuse incorporating dielectric and amorphous silicon interlayers
US5780323A (en) 1990-04-12 1998-07-14 Actel Corporation Fabrication method for metal-to-metal antifuses incorporating a tungsten via plug
US5272101A (en) * 1990-04-12 1993-12-21 Actel Corporation Electrically programmable antifuse and fabrication processes
US5614756A (en) 1990-04-12 1997-03-25 Actel Corporation Metal-to-metal antifuse with conductive
EP0558176A1 (en) * 1992-02-26 1993-09-01 Actel Corporation Metal-to-metal antifuse with improved diffusion barrier layer
US5308795A (en) * 1992-11-04 1994-05-03 Actel Corporation Above via metal-to-metal antifuse
US6690044B1 (en) * 1993-03-19 2004-02-10 Micron Technology, Inc. Approach to avoid buckling BPSG by using an intermediate barrier layer
JP3170101B2 (ja) * 1993-04-15 2001-05-28 株式会社東芝 半導体装置及びその製造方法
US5581111A (en) * 1993-07-07 1996-12-03 Actel Corporation Dielectric-polysilicon-dielectric antifuse for field programmable logic applications
US5369054A (en) * 1993-07-07 1994-11-29 Actel Corporation Circuits for ESD protection of metal-to-metal antifuses during processing
US5485031A (en) 1993-11-22 1996-01-16 Actel Corporation Antifuse structure suitable for VLSI application
US5789764A (en) * 1995-04-14 1998-08-04 Actel Corporation Antifuse with improved antifuse material
WO1996038861A1 (en) 1995-06-02 1996-12-05 Actel Corporation Raised tungsten plug antifuse and fabrication process
US5986322A (en) * 1995-06-06 1999-11-16 Mccollum; John L. Reduced leakage antifuse structure
US5741720A (en) * 1995-10-04 1998-04-21 Actel Corporation Method of programming an improved metal-to-metal via-type antifuse
US5602053A (en) * 1996-04-08 1997-02-11 Chartered Semidconductor Manufacturing Pte, Ltd. Method of making a dual damascene antifuse structure
KR101416876B1 (ko) 2006-11-17 2014-07-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제조방법
US10714422B2 (en) 2018-10-16 2020-07-14 Globalfoundries Inc. Anti-fuse with self aligned via patterning
US10892222B1 (en) 2019-09-04 2021-01-12 Globalfoundries Inc. Anti-fuse for an integrated circuit (IC) product and method of making such an anti-fuse for an IC product
US10957701B1 (en) 2019-11-11 2021-03-23 Globalfoundries U.S. Inc. Fin-based anti-fuse device for integrated circuit (IC) products, methods of making such an anti-fuse device and IC products comprising such an anti-fuse device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543480A (en) * 1977-06-09 1979-01-11 Fujitsu Ltd Manufacture of semiconductor device
JPS5720463A (en) * 1980-07-14 1982-02-02 Toshiba Corp Semiconductor memory device
JPH0656876B2 (ja) * 1984-12-28 1994-07-27 富士通株式会社 半導体装置
US4949084A (en) * 1985-10-29 1990-08-14 Ohio Associated Enterprises, Inc. Programmable integrated crosspoint switch
US4943538A (en) * 1986-05-09 1990-07-24 Actel Corporation Programmable low impedance anti-fuse element
US5134457A (en) * 1986-05-09 1992-07-28 Actel Corporation Programmable low-impedance anti-fuse element
JPH01184942A (ja) * 1988-01-20 1989-07-24 Toshiba Corp トリミング素子とその電気短絡方法
US5404029A (en) * 1990-04-12 1995-04-04 Actel Corporation Electrically programmable antifuse element
US5100827A (en) * 1991-02-27 1992-03-31 At&T Bell Laboratories Buried antifuse
US5126290A (en) * 1991-09-11 1992-06-30 Micron Technology, Inc. Method of making memory devices utilizing one-sided ozone teos spacers

Also Published As

Publication number Publication date
US5412245A (en) 1995-05-02
EP0602836A1 (en) 1994-06-22
JPH06216254A (ja) 1994-08-05

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