JPH0620283Y2 - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPH0620283Y2 JPH0620283Y2 JP14555889U JP14555889U JPH0620283Y2 JP H0620283 Y2 JPH0620283 Y2 JP H0620283Y2 JP 14555889 U JP14555889 U JP 14555889U JP 14555889 U JP14555889 U JP 14555889U JP H0620283 Y2 JPH0620283 Y2 JP H0620283Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- square wave
- scanning
- wave oscillator
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 28
- 239000011888 foil Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555889U JPH0620283Y2 (ja) | 1989-12-18 | 1989-12-18 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555889U JPH0620283Y2 (ja) | 1989-12-18 | 1989-12-18 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0384546U JPH0384546U (enrdf_load_stackoverflow) | 1991-08-27 |
| JPH0620283Y2 true JPH0620283Y2 (ja) | 1994-05-25 |
Family
ID=31692187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14555889U Expired - Lifetime JPH0620283Y2 (ja) | 1989-12-18 | 1989-12-18 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0620283Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-12-18 JP JP14555889U patent/JPH0620283Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0384546U (enrdf_load_stackoverflow) | 1991-08-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4260897A (en) | Method of and device for implanting ions in a target | |
| GB2137408A (en) | Scanning a beam of charged particles | |
| US7498590B2 (en) | Scan pattern for an ion implanter | |
| US5099130A (en) | Apparatus and methods relating to scanning ion beams | |
| JPH0513037A (ja) | 荷電粒子ビーム装置及びその制御方法 | |
| JPH0620283Y2 (ja) | 電子線照射装置 | |
| US5744810A (en) | Method and system for exposing pattern on object by charged particle beam | |
| EP0009049B1 (en) | Apparatus and method for fabricating microminiature devices | |
| US2620456A (en) | Circuits for the generation of electrical variations | |
| JPH0836987A (ja) | イオンインプランタ、およびウエハにイオンビームを注入するための方法 | |
| KR100213462B1 (ko) | 단극전하입자의 빔집속 제어 방법 및 장치 | |
| JPS60130031A (ja) | パルスビ−ム発生装置 | |
| JPH01231252A (ja) | 電子ビーム処理装置 | |
| JPH025346A (ja) | イオン注入装置およびイオンビームの調整方法 | |
| TWI634584B (zh) | 離子束掃描器、離子佈植機及控制點離子束的方法 | |
| JPH06310082A (ja) | イオン注入装置におけるビーム軌道の復元方法 | |
| JP2822055B2 (ja) | 荷電粒子ビーム描画装置における漏れビームの影響除去方法および装置 | |
| JPS6212624B2 (enrdf_load_stackoverflow) | ||
| JPH0520000U (ja) | 電子線照射装置 | |
| JPH04122900A (ja) | 電子線分布自動補正機能付電子線照射装置 | |
| JPS62203099A (ja) | 電子線照射装置 | |
| JPH03112043A (ja) | 線状電子ビーム照射方法とその装置 | |
| JPH05325867A (ja) | パルスビーム発生方法および発生装置 | |
| JPS632238A (ja) | 電子ビ−ムパルスゲ−ト | |
| JPS6264036A (ja) | 電子ビ−ム装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |