JPH0614831Y2 - 滴下装置 - Google Patents

滴下装置

Info

Publication number
JPH0614831Y2
JPH0614831Y2 JP12910988U JP12910988U JPH0614831Y2 JP H0614831 Y2 JPH0614831 Y2 JP H0614831Y2 JP 12910988 U JP12910988 U JP 12910988U JP 12910988 U JP12910988 U JP 12910988U JP H0614831 Y2 JPH0614831 Y2 JP H0614831Y2
Authority
JP
Japan
Prior art keywords
container
liquid
path
valve
dropping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12910988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248171U (enrdf_load_stackoverflow
Inventor
三夫 三井
廣行 河口
Original Assignee
ホーヤ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ホーヤ株式会社 filed Critical ホーヤ株式会社
Priority to JP12910988U priority Critical patent/JPH0614831Y2/ja
Publication of JPH0248171U publication Critical patent/JPH0248171U/ja
Application granted granted Critical
Publication of JPH0614831Y2 publication Critical patent/JPH0614831Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Coating Apparatus (AREA)
JP12910988U 1988-09-30 1988-09-30 滴下装置 Expired - Lifetime JPH0614831Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12910988U JPH0614831Y2 (ja) 1988-09-30 1988-09-30 滴下装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12910988U JPH0614831Y2 (ja) 1988-09-30 1988-09-30 滴下装置

Publications (2)

Publication Number Publication Date
JPH0248171U JPH0248171U (enrdf_load_stackoverflow) 1990-04-03
JPH0614831Y2 true JPH0614831Y2 (ja) 1994-04-20

Family

ID=31383080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12910988U Expired - Lifetime JPH0614831Y2 (ja) 1988-09-30 1988-09-30 滴下装置

Country Status (1)

Country Link
JP (1) JPH0614831Y2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2504343B2 (ja) * 1991-03-22 1996-06-05 ローム株式会社 薬液塗布装置における薬液供給装置
JPH0520853U (ja) * 1991-08-30 1993-03-19 株式会社アツギユニシア 切削機械のドリルユニツト構造
JP5571056B2 (ja) * 2011-11-04 2014-08-13 東京エレクトロン株式会社 処理液供給方法、プログラム、コンピュータ記憶媒体及び処理液供給装置
JP6736989B2 (ja) * 2016-06-07 2020-08-05 東京エレクトロン株式会社 処理液供給装置、機器ユニット、処理液供給方法及び記憶媒体

Also Published As

Publication number Publication date
JPH0248171U (enrdf_load_stackoverflow) 1990-04-03

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