JPH0614473Y2 - 可搬式クリーンベンチ - Google Patents

可搬式クリーンベンチ

Info

Publication number
JPH0614473Y2
JPH0614473Y2 JP1987179746U JP17974687U JPH0614473Y2 JP H0614473 Y2 JPH0614473 Y2 JP H0614473Y2 JP 1987179746 U JP1987179746 U JP 1987179746U JP 17974687 U JP17974687 U JP 17974687U JP H0614473 Y2 JPH0614473 Y2 JP H0614473Y2
Authority
JP
Japan
Prior art keywords
clean
housing
clean bench
air
portable clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987179746U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0184424U (enrdf_load_stackoverflow
Inventor
直規 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1987179746U priority Critical patent/JPH0614473Y2/ja
Publication of JPH0184424U publication Critical patent/JPH0184424U/ja
Application granted granted Critical
Publication of JPH0614473Y2 publication Critical patent/JPH0614473Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1987179746U 1987-11-27 1987-11-27 可搬式クリーンベンチ Expired - Lifetime JPH0614473Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987179746U JPH0614473Y2 (ja) 1987-11-27 1987-11-27 可搬式クリーンベンチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987179746U JPH0614473Y2 (ja) 1987-11-27 1987-11-27 可搬式クリーンベンチ

Publications (2)

Publication Number Publication Date
JPH0184424U JPH0184424U (enrdf_load_stackoverflow) 1989-06-05
JPH0614473Y2 true JPH0614473Y2 (ja) 1994-04-13

Family

ID=31471291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987179746U Expired - Lifetime JPH0614473Y2 (ja) 1987-11-27 1987-11-27 可搬式クリーンベンチ

Country Status (1)

Country Link
JP (1) JPH0614473Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3688784B2 (ja) * 1995-12-26 2005-08-31 大日本スクリーン製造株式会社 エアフィルタを備えた基板処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63185040U (enrdf_load_stackoverflow) * 1987-05-19 1988-11-28

Also Published As

Publication number Publication date
JPH0184424U (enrdf_load_stackoverflow) 1989-06-05

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