JPH0614472Y2 - 処理システム - Google Patents
処理システムInfo
- Publication number
- JPH0614472Y2 JPH0614472Y2 JP1987168867U JP16886787U JPH0614472Y2 JP H0614472 Y2 JPH0614472 Y2 JP H0614472Y2 JP 1987168867 U JP1987168867 U JP 1987168867U JP 16886787 U JP16886787 U JP 16886787U JP H0614472 Y2 JPH0614472 Y2 JP H0614472Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- wafer
- processing
- transfer
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012545 processing Methods 0.000 title claims description 98
- 238000012546 transfer Methods 0.000 claims description 61
- 238000000034 method Methods 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 77
- 230000003749 cleanliness Effects 0.000 description 18
- 230000007246 mechanism Effects 0.000 description 11
- 239000000428 dust Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168867U JPH0614472Y2 (ja) | 1987-11-04 | 1987-11-04 | 処理システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168867U JPH0614472Y2 (ja) | 1987-11-04 | 1987-11-04 | 処理システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0173923U JPH0173923U (enrdf_load_stackoverflow) | 1989-05-18 |
| JPH0614472Y2 true JPH0614472Y2 (ja) | 1994-04-13 |
Family
ID=31458419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168867U Expired - Lifetime JPH0614472Y2 (ja) | 1987-11-04 | 1987-11-04 | 処理システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614472Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013067493A (ja) * | 2011-09-22 | 2013-04-18 | Murata Machinery Ltd | クリーンルーム用の自動倉庫 |
| JP2023018296A (ja) * | 2021-07-27 | 2023-02-08 | 信越半導体株式会社 | クリーンルーム |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009127981A (ja) * | 2007-11-27 | 2009-06-11 | Semiconductor Energy Lab Co Ltd | クリーンルーム、成膜方法、および半導体装置の作製方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625031A (ja) * | 1985-06-28 | 1987-01-12 | Kajima Corp | 部分的に清浄度の異なるクリ−ンル−ム |
| JPS63292616A (ja) * | 1987-05-26 | 1988-11-29 | Shimizu Constr Co Ltd | 半導体製造装置 |
-
1987
- 1987-11-04 JP JP1987168867U patent/JPH0614472Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013067493A (ja) * | 2011-09-22 | 2013-04-18 | Murata Machinery Ltd | クリーンルーム用の自動倉庫 |
| JP2023018296A (ja) * | 2021-07-27 | 2023-02-08 | 信越半導体株式会社 | クリーンルーム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0173923U (enrdf_load_stackoverflow) | 1989-05-18 |
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