JPH0610685Y2 - ウエハ移し換え装置 - Google Patents

ウエハ移し換え装置

Info

Publication number
JPH0610685Y2
JPH0610685Y2 JP1984186786U JP18678684U JPH0610685Y2 JP H0610685 Y2 JPH0610685 Y2 JP H0610685Y2 JP 1984186786 U JP1984186786 U JP 1984186786U JP 18678684 U JP18678684 U JP 18678684U JP H0610685 Y2 JPH0610685 Y2 JP H0610685Y2
Authority
JP
Japan
Prior art keywords
wafer
wafer chuck
rod
chuck
movement mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984186786U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61102044U (US07223432-20070529-C00017.png
Inventor
亘 大加瀬
健一 木下
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1984186786U priority Critical patent/JPH0610685Y2/ja
Publication of JPS61102044U publication Critical patent/JPS61102044U/ja
Application granted granted Critical
Publication of JPH0610685Y2 publication Critical patent/JPH0610685Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1984186786U 1984-12-11 1984-12-11 ウエハ移し換え装置 Expired - Lifetime JPH0610685Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984186786U JPH0610685Y2 (ja) 1984-12-11 1984-12-11 ウエハ移し換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984186786U JPH0610685Y2 (ja) 1984-12-11 1984-12-11 ウエハ移し換え装置

Publications (2)

Publication Number Publication Date
JPS61102044U JPS61102044U (US07223432-20070529-C00017.png) 1986-06-28
JPH0610685Y2 true JPH0610685Y2 (ja) 1994-03-16

Family

ID=30744255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984186786U Expired - Lifetime JPH0610685Y2 (ja) 1984-12-11 1984-12-11 ウエハ移し換え装置

Country Status (1)

Country Link
JP (1) JPH0610685Y2 (US07223432-20070529-C00017.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131465A (ja) * 1984-11-30 1986-06-19 Tomuko:Kk ウエハ移換え装置

Also Published As

Publication number Publication date
JPS61102044U (US07223432-20070529-C00017.png) 1986-06-28

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