JPH0610145A - 化学蒸着による製品の製造方法およびそれによって得られた製品 - Google Patents

化学蒸着による製品の製造方法およびそれによって得られた製品

Info

Publication number
JPH0610145A
JPH0610145A JP5041584A JP4158493A JPH0610145A JP H0610145 A JPH0610145 A JP H0610145A JP 5041584 A JP5041584 A JP 5041584A JP 4158493 A JP4158493 A JP 4158493A JP H0610145 A JPH0610145 A JP H0610145A
Authority
JP
Japan
Prior art keywords
support member
product
insert
substrate
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5041584A
Other languages
English (en)
Japanese (ja)
Inventor
Thomas R Anthony
トーマス・リチャード・アンソニー
James F Fleischer
ジェームス・フルトン・フレッチャー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JPH0610145A publication Critical patent/JPH0610145A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49428—Gas and water specific plumbing component making
    • Y10T29/49432—Nozzle making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4981—Utilizing transitory attached element or associated separate material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4998—Combined manufacture including applying or shaping of fluent material
    • Y10T29/49982—Coating
    • Y10T29/49984—Coating and casting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12229—Intermediate article [e.g., blank, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Looms (AREA)
JP5041584A 1992-03-04 1993-03-03 化学蒸着による製品の製造方法およびそれによって得られた製品 Withdrawn JPH0610145A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US845992 1992-03-04
US07/845,992 US5175929A (en) 1992-03-04 1992-03-04 Method for producing articles by chemical vapor deposition

Publications (1)

Publication Number Publication Date
JPH0610145A true JPH0610145A (ja) 1994-01-18

Family

ID=25296632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5041584A Withdrawn JPH0610145A (ja) 1992-03-04 1993-03-03 化学蒸着による製品の製造方法およびそれによって得られた製品

Country Status (6)

Country Link
US (1) US5175929A (oth)
EP (1) EP0569117A2 (oth)
JP (1) JPH0610145A (oth)
KR (1) KR930019858A (oth)
CA (1) CA2089280A1 (oth)
ZA (1) ZA931111B (oth)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0613963A1 (en) * 1993-03-05 1994-09-07 General Electric Company Production of crack-free CVD diamond articles
US5468934A (en) * 1994-06-15 1995-11-21 General Electric Company Apparatus for annealing diamond water jet mixing tubes
CN1035049C (zh) * 1994-06-24 1997-06-04 宗贵升 变长线扫描快速自动成型方法和装置
US5635008A (en) * 1995-08-07 1997-06-03 Trw Inc. High precision replication system
US6133577A (en) * 1997-02-04 2000-10-17 Advanced Energy Systems, Inc. Method and apparatus for producing extreme ultra-violet light for use in photolithography
US6105885A (en) * 1998-04-03 2000-08-22 Advanced Energy Systems, Inc. Fluid nozzle system and method in an emitted energy system for photolithography
US6180952B1 (en) 1998-04-03 2001-01-30 Advanced Energy Systems, Inc. Holder assembly system and method in an emitted energy system for photolithography
US6194733B1 (en) 1998-04-03 2001-02-27 Advanced Energy Systems, Inc. Method and apparatus for adjustably supporting a light source for use in photolithography
US6065203A (en) * 1998-04-03 2000-05-23 Advanced Energy Systems, Inc. Method of manufacturing very small diameter deep passages
US6042758A (en) * 1998-05-05 2000-03-28 Cvd, Inc. Precision replication by chemical vapor deposition
FR2831892B1 (fr) * 2001-11-06 2004-02-06 Snecma Moteurs Procede de realisation d'un revetement continu a la surface d'une piece
JP4064315B2 (ja) * 2003-08-20 2008-03-19 信越化学工業株式会社 誘導結合プラズマトーチ及び元素分析装置
EP1846589B1 (en) * 2005-01-24 2014-10-15 Danfoss A/S A method for coating an object
US7872292B2 (en) * 2006-02-21 2011-01-18 United Microelectronics Corp. Capacitance dielectric layer and capacitor
US7753074B2 (en) 2006-07-28 2010-07-13 Masco Corporation Of Indiana Mixing valve
US8578966B2 (en) * 2006-07-28 2013-11-12 Masco Corporation Of Indiana Mixing valve
US8137747B2 (en) 2008-07-30 2012-03-20 Honeywell International Inc. Components, turbochargers, and methods of forming the components
US20100088894A1 (en) * 2008-10-10 2010-04-15 Stark Roger M Method for preparing abrasive waterjet mixing tubes
CN103261477B (zh) 2010-12-08 2015-09-30 欧瑞康先进科技股份公司 用于向基底上沉积层的设备和方法
GB201401265D0 (en) 2014-01-26 2014-03-12 Miller Donald S Composite focus tubes

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3138434A (en) * 1961-04-26 1964-06-23 Gen Electric Deposition method of forming a pyrolytic graphite article
US3399969A (en) * 1966-02-10 1968-09-03 Gulf General Atomic Inc Deposition of massive pyrolytic carbon
DE2618293A1 (de) * 1976-04-27 1977-11-17 Papst Motoren Kg Kollektorloser gleichstrommotor
US4220618A (en) * 1978-07-26 1980-09-02 M & T Manufacturing Company Method of making a mold with a core supporting bushing
US4292342A (en) * 1980-05-09 1981-09-29 Motorola, Inc. High pressure plasma deposition of silicon
SE442305B (sv) * 1984-06-27 1985-12-16 Santrade Ltd Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen
CH664768A5 (de) * 1985-06-20 1988-03-31 Balzers Hochvakuum Verfahren zur beschichtung von substraten in einer vakuumkammer.
US4830702A (en) * 1987-07-02 1989-05-16 General Electric Company Hollow cathode plasma assisted apparatus and method of diamond synthesis
JPH01138110A (ja) * 1987-11-25 1989-05-31 Showa Denko Kk ダイヤモンド製パイプおよびその製造法
JPH0757039B2 (ja) * 1988-05-09 1995-06-14 株式会社ケンウッド 音響用振動板及びその製造法
JPH03141110A (ja) * 1989-10-24 1991-06-17 Showa Denko Kk ダイヤモンド製立体形状製品の製造方法
GB9015609D0 (en) * 1990-07-16 1990-09-05 De Beers Ind Diamond Tool insert

Also Published As

Publication number Publication date
CA2089280A1 (en) 1993-09-05
US5175929A (en) 1993-01-05
EP0569117A3 (oth) 1994-03-02
ZA931111B (en) 1993-12-07
EP0569117A2 (en) 1993-11-10
KR930019858A (ko) 1993-10-19

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Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20000509