JPH0588503B2 - - Google Patents

Info

Publication number
JPH0588503B2
JPH0588503B2 JP62051575A JP5157587A JPH0588503B2 JP H0588503 B2 JPH0588503 B2 JP H0588503B2 JP 62051575 A JP62051575 A JP 62051575A JP 5157587 A JP5157587 A JP 5157587A JP H0588503 B2 JPH0588503 B2 JP H0588503B2
Authority
JP
Japan
Prior art keywords
ion beam
signal
beam current
output signal
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62051575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63218139A (ja
Inventor
Hachiro Shimayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP5157587A priority Critical patent/JPS63218139A/ja
Publication of JPS63218139A publication Critical patent/JPS63218139A/ja
Publication of JPH0588503B2 publication Critical patent/JPH0588503B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP5157587A 1987-03-06 1987-03-06 イオンビ−ム装置 Granted JPS63218139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5157587A JPS63218139A (ja) 1987-03-06 1987-03-06 イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5157587A JPS63218139A (ja) 1987-03-06 1987-03-06 イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS63218139A JPS63218139A (ja) 1988-09-12
JPH0588503B2 true JPH0588503B2 (enExample) 1993-12-22

Family

ID=12890746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5157587A Granted JPS63218139A (ja) 1987-03-06 1987-03-06 イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS63218139A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4676461B2 (ja) * 2007-06-27 2011-04-27 株式会社ニューフレアテクノロジー 電子ビーム描画装置及び電子ビームの電流密度調整方法
CN108695128A (zh) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 具有束流自动反馈控制的考夫曼离子源

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158852A (ja) * 1982-03-17 1983-09-21 Jeol Ltd 荷電粒子フイルタ
JPS6039748A (ja) * 1983-08-12 1985-03-01 Jeol Ltd イオンビ−ム集束装置

Also Published As

Publication number Publication date
JPS63218139A (ja) 1988-09-12

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