JPH0587937B2 - - Google Patents
Info
- Publication number
- JPH0587937B2 JPH0587937B2 JP2072198A JP7219890A JPH0587937B2 JP H0587937 B2 JPH0587937 B2 JP H0587937B2 JP 2072198 A JP2072198 A JP 2072198A JP 7219890 A JP7219890 A JP 7219890A JP H0587937 B2 JPH0587937 B2 JP H0587937B2
- Authority
- JP
- Japan
- Prior art keywords
- tip
- anode
- arc
- cathode
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 14
- 229910052753 mercury Inorganic materials 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 17
- 229910052721 tungsten Inorganic materials 0.000 description 17
- 239000010937 tungsten Substances 0.000 description 17
- 230000008020 evaporation Effects 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 239000011888 foil Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Discharge Lamp (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7219890A JPH03274648A (ja) | 1990-03-23 | 1990-03-23 | ショートアーク型水銀蒸気放電灯 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7219890A JPH03274648A (ja) | 1990-03-23 | 1990-03-23 | ショートアーク型水銀蒸気放電灯 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03274648A JPH03274648A (ja) | 1991-12-05 |
| JPH0587937B2 true JPH0587937B2 (ko) | 1993-12-20 |
Family
ID=13482295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7219890A Granted JPH03274648A (ja) | 1990-03-23 | 1990-03-23 | ショートアーク型水銀蒸気放電灯 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03274648A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3158972B2 (ja) * | 1995-06-26 | 2001-04-23 | ウシオ電機株式会社 | ショートアーク型水銀ランプ及びその点灯方法 |
| JP4897397B2 (ja) * | 2005-12-27 | 2012-03-14 | ハリソン東芝ライティング株式会社 | 紫外線照射装置 |
| JP5278235B2 (ja) * | 2009-08-03 | 2013-09-04 | ウシオ電機株式会社 | ショートアーク型放電ランプ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119481A (ko) * | 1973-03-16 | 1974-11-14 | ||
| JPS6059733A (ja) * | 1983-09-13 | 1985-04-06 | Ushio Inc | 半導体露光装置 |
-
1990
- 1990-03-23 JP JP7219890A patent/JPH03274648A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119481A (ko) * | 1973-03-16 | 1974-11-14 | ||
| JPS6059733A (ja) * | 1983-09-13 | 1985-04-06 | Ushio Inc | 半導体露光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03274648A (ja) | 1991-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4400095B2 (ja) | ショートアーク型超高圧水銀ランプ | |
| KR100528232B1 (ko) | 쇼트 아크 방전 램프 | |
| JP2004247092A (ja) | ショートアーク型超高圧水銀ランプ | |
| JP3596448B2 (ja) | ショートアーク型水銀放電ランプ | |
| JPH0917387A (ja) | ショートアーク型水銀ランプ及びその点灯方法 | |
| JPH02304857A (ja) | ショートアーク型高圧水銀蒸気ランプ | |
| JPH0587937B2 (ko) | ||
| JPH07226187A (ja) | 短アーク放電灯 | |
| JP2518015B2 (ja) | 放電灯 | |
| JPH0157462B2 (ko) | ||
| JP2001110355A (ja) | 放電灯電極 | |
| JP2009230904A (ja) | ショートアーク型放電ランプ | |
| JPH0533003Y2 (ko) | ||
| JP2009105062A (ja) | ショートアーク型超高圧水銀ランプ | |
| JP2800608B2 (ja) | 無電極放電灯装置 | |
| JP2548260B2 (ja) | 低圧水銀蒸気放電灯および低圧水銀蒸気放電灯装置 | |
| JP2741639B2 (ja) | ショートアーク型水銀灯 | |
| WO2018042888A1 (ja) | レーザ駆動ランプ | |
| JP2003132840A (ja) | 超高圧水銀ランプ及びそれを用いた半導体露光装置 | |
| JP3591515B2 (ja) | ショートアーク型超高圧放電ランプ | |
| JP3409373B2 (ja) | ソレノイド磁界式放電灯 | |
| JPH0660849A (ja) | 蛍光ランプ | |
| JP2021022503A (ja) | 放電ランプ | |
| JP2003162980A (ja) | 放電灯及び放電灯点灯装置 | |
| JPH11283557A (ja) | 高圧放電灯及び光源装置 |