JPH0587310B2 - - Google Patents
Info
- Publication number
- JPH0587310B2 JPH0587310B2 JP61078027A JP7802786A JPH0587310B2 JP H0587310 B2 JPH0587310 B2 JP H0587310B2 JP 61078027 A JP61078027 A JP 61078027A JP 7802786 A JP7802786 A JP 7802786A JP H0587310 B2 JPH0587310 B2 JP H0587310B2
- Authority
- JP
- Japan
- Prior art keywords
- drying
- coating
- film
- temperature
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229920001721 polyimide Polymers 0.000 claims description 28
- 238000000576 coating method Methods 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 22
- 238000001035 drying Methods 0.000 claims description 19
- 239000004642 Polyimide Substances 0.000 claims description 17
- 239000002243 precursor Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 12
- 239000002904 solvent Substances 0.000 claims description 12
- 239000009719 polyimide resin Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- 238000009835 boiling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 11
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- YCUVUDODLRLVIC-UHFFFAOYSA-N Sudan black B Chemical compound C1=CC(=C23)NC(C)(C)NC2=CC=CC3=C1N=NC(C1=CC=CC=C11)=CC=C1N=NC1=CC=CC=C1 YCUVUDODLRLVIC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PXOZAFXVEWKXED-UHFFFAOYSA-N chembl1590721 Chemical compound C1=CC(NC(=O)C)=CC=C1N=NC1=CC(C)=CC=C1O PXOZAFXVEWKXED-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- FTUYQIPAPWPHNC-UHFFFAOYSA-M sodium;4-[[4-[benzyl(ethyl)amino]phenyl]-[4-[benzyl(ethyl)azaniumylidene]cyclohexa-2,5-dien-1-ylidene]methyl]benzene-1,3-disulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=CC=CC=2)C=2C(=CC(=CC=2)S([O-])(=O)=O)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC=C1 FTUYQIPAPWPHNC-UHFFFAOYSA-M 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61078027A JPS62234575A (ja) | 1986-04-04 | 1986-04-04 | 塗布被膜の乾燥方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61078027A JPS62234575A (ja) | 1986-04-04 | 1986-04-04 | 塗布被膜の乾燥方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62234575A JPS62234575A (ja) | 1987-10-14 |
JPH0587310B2 true JPH0587310B2 (zh) | 1993-12-16 |
Family
ID=13650327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61078027A Granted JPS62234575A (ja) | 1986-04-04 | 1986-04-04 | 塗布被膜の乾燥方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62234575A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6875252B2 (ja) | 2017-10-26 | 2021-05-19 | 信越化学工業株式会社 | ポリイミドペーストの乾燥方法及び高光電変換効率太陽電池の製造方法 |
-
1986
- 1986-04-04 JP JP61078027A patent/JPS62234575A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62234575A (ja) | 1987-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |