JPH0587030B2 - - Google Patents

Info

Publication number
JPH0587030B2
JPH0587030B2 JP60164781A JP16478185A JPH0587030B2 JP H0587030 B2 JPH0587030 B2 JP H0587030B2 JP 60164781 A JP60164781 A JP 60164781A JP 16478185 A JP16478185 A JP 16478185A JP H0587030 B2 JPH0587030 B2 JP H0587030B2
Authority
JP
Japan
Prior art keywords
layer
region
impurity
floating gate
operating region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60164781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225459A (ja
Inventor
Tetsuo Fujii
Toshio Sakakibara
Nobuyoshi Sakakibara
Yutaka Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP60164781A priority Critical patent/JPS6225459A/ja
Priority to US06/887,625 priority patent/US4774556A/en
Publication of JPS6225459A publication Critical patent/JPS6225459A/ja
Publication of JPH0587030B2 publication Critical patent/JPH0587030B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512—Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates

Landscapes

  • Non-Volatile Memory (AREA)
JP60164781A 1985-07-25 1985-07-25 不揮発性半導体記憶装置 Granted JPS6225459A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60164781A JPS6225459A (ja) 1985-07-25 1985-07-25 不揮発性半導体記憶装置
US06/887,625 US4774556A (en) 1985-07-25 1986-07-21 Non-volatile semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164781A JPS6225459A (ja) 1985-07-25 1985-07-25 不揮発性半導体記憶装置

Publications (2)

Publication Number Publication Date
JPS6225459A JPS6225459A (ja) 1987-02-03
JPH0587030B2 true JPH0587030B2 (enrdf_load_stackoverflow) 1993-12-15

Family

ID=15799825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164781A Granted JPS6225459A (ja) 1985-07-25 1985-07-25 不揮発性半導体記憶装置

Country Status (1)

Country Link
JP (1) JPS6225459A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07120717B2 (ja) * 1986-05-19 1995-12-20 日本電気株式会社 半導体記憶装置の製造方法
JPH0644632B2 (ja) * 1987-06-29 1994-06-08 株式会社東芝 半導体記憶装置
JP2735193B2 (ja) * 1987-08-25 1998-04-02 株式会社東芝 不揮発性半導体装置及びその製造方法
JP3070531B2 (ja) * 1997-06-27 2000-07-31 日本電気株式会社 不揮発性半導体記憶装置
JP3425853B2 (ja) * 1997-08-29 2003-07-14 Ｎｅｃエレクトロニクス株式会社 不揮発性半導体記憶装置
KR100598049B1 (ko) * 2004-10-28 2006-07-07 삼성전자주식회사 멀티 비트 비휘발성 메모리 셀을 포함하는 반도체 소자 및그 제조 방법
JP5092431B2 (ja) * 2006-02-03 2012-12-05 株式会社デンソー 半導体装置
KR100780249B1 (ko) * 2006-11-30 2007-11-27 동부일렉트로닉스 주식회사 플래시 메모리 소자

Also Published As

Publication number Publication date
JPS6225459A (ja) 1987-02-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term