JPH058670Y2 - - Google Patents

Info

Publication number
JPH058670Y2
JPH058670Y2 JP1985135261U JP13526185U JPH058670Y2 JP H058670 Y2 JPH058670 Y2 JP H058670Y2 JP 1985135261 U JP1985135261 U JP 1985135261U JP 13526185 U JP13526185 U JP 13526185U JP H058670 Y2 JPH058670 Y2 JP H058670Y2
Authority
JP
Japan
Prior art keywords
film
reaction chamber
irradiation window
reaction
inclined surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985135261U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244435U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985135261U priority Critical patent/JPH058670Y2/ja
Publication of JPS6244435U publication Critical patent/JPS6244435U/ja
Application granted granted Critical
Publication of JPH058670Y2 publication Critical patent/JPH058670Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985135261U 1985-09-04 1985-09-04 Expired - Lifetime JPH058670Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985135261U JPH058670Y2 (enExample) 1985-09-04 1985-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985135261U JPH058670Y2 (enExample) 1985-09-04 1985-09-04

Publications (2)

Publication Number Publication Date
JPS6244435U JPS6244435U (enExample) 1987-03-17
JPH058670Y2 true JPH058670Y2 (enExample) 1993-03-04

Family

ID=31037276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985135261U Expired - Lifetime JPH058670Y2 (enExample) 1985-09-04 1985-09-04

Country Status (1)

Country Link
JP (1) JPH058670Y2 (enExample)

Also Published As

Publication number Publication date
JPS6244435U (enExample) 1987-03-17

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