JPH0584870B2 - - Google Patents
Info
- Publication number
- JPH0584870B2 JPH0584870B2 JP62101270A JP10127087A JPH0584870B2 JP H0584870 B2 JPH0584870 B2 JP H0584870B2 JP 62101270 A JP62101270 A JP 62101270A JP 10127087 A JP10127087 A JP 10127087A JP H0584870 B2 JPH0584870 B2 JP H0584870B2
- Authority
- JP
- Japan
- Prior art keywords
- acceleration
- inclination
- detection device
- resistance element
- acceleration sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 claims description 80
- 238000001514 detection method Methods 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims 2
- 230000035882 stress Effects 0.000 description 15
- 230000008859 change Effects 0.000 description 10
- 239000013078 crystal Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000009993 protective function Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Pressure Sensors (AREA)
- Geophysics And Detection Of Objects (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62101270A JPS63266359A (ja) | 1987-04-24 | 1987-04-24 | 加速度・傾斜度検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62101270A JPS63266359A (ja) | 1987-04-24 | 1987-04-24 | 加速度・傾斜度検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63266359A JPS63266359A (ja) | 1988-11-02 |
| JPH0584870B2 true JPH0584870B2 (US06521211-20030218-C00004.png) | 1993-12-03 |
Family
ID=14296193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62101270A Granted JPS63266359A (ja) | 1987-04-24 | 1987-04-24 | 加速度・傾斜度検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63266359A (US06521211-20030218-C00004.png) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6864677B1 (en) | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
| WO1991010118A1 (en) * | 1989-12-28 | 1991-07-11 | Wacoh Corporation | Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus |
| JP2004264053A (ja) | 2003-02-10 | 2004-09-24 | Tokyo Electron Ltd | 加速度センサ及び傾斜検出方法 |
| JP4261468B2 (ja) * | 2004-11-18 | 2009-04-30 | Ｔｄｋ株式会社 | 加速度センサ |
| JP2006236265A (ja) * | 2005-02-28 | 2006-09-07 | Toshiba Corp | 電子機器および省電力制御方法 |
| JP2009186244A (ja) * | 2008-02-04 | 2009-08-20 | Kochi Univ Of Technology | 傾斜角度推定システム、相対角度推定システム及び角速度推定システム |
| JP5424226B2 (ja) * | 2012-07-19 | 2014-02-26 | 公立大学法人高知工科大学 | 傾斜角度推定システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6015883A (ja) * | 1983-07-06 | 1985-01-26 | Ricoh Co Ltd | Ｖｔｒシステム |
-
1987
- 1987-04-24 JP JP62101270A patent/JPS63266359A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6015883A (ja) * | 1983-07-06 | 1985-01-26 | Ricoh Co Ltd | Ｖｔｒシステム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63266359A (ja) | 1988-11-02 |
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