JPH0581357B2 - - Google Patents

Info

Publication number
JPH0581357B2
JPH0581357B2 JP60044900A JP4490085A JPH0581357B2 JP H0581357 B2 JPH0581357 B2 JP H0581357B2 JP 60044900 A JP60044900 A JP 60044900A JP 4490085 A JP4490085 A JP 4490085A JP H0581357 B2 JPH0581357 B2 JP H0581357B2
Authority
JP
Japan
Prior art keywords
mark
stage
alignment
detecting
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60044900A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61206584A (ja
Inventor
Keiichiro Sakado
Shoichi Tanimoto
Joji Iwamoto
Hiroshi Shirasu
Kyoto Majima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP60044900A priority Critical patent/JPS61206584A/ja
Publication of JPS61206584A publication Critical patent/JPS61206584A/ja
Priority to US07/004,265 priority patent/US4769523A/en
Publication of JPH0581357B2 publication Critical patent/JPH0581357B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP60044900A 1985-03-08 1985-03-08 基板加工装置 Granted JPS61206584A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60044900A JPS61206584A (ja) 1985-03-08 1985-03-08 基板加工装置
US07/004,265 US4769523A (en) 1985-03-08 1987-01-09 Laser processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60044900A JPS61206584A (ja) 1985-03-08 1985-03-08 基板加工装置

Publications (2)

Publication Number Publication Date
JPS61206584A JPS61206584A (ja) 1986-09-12
JPH0581357B2 true JPH0581357B2 (enrdf_load_stackoverflow) 1993-11-12

Family

ID=12704350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60044900A Granted JPS61206584A (ja) 1985-03-08 1985-03-08 基板加工装置

Country Status (1)

Country Link
JP (1) JPS61206584A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2965040B2 (ja) * 1988-06-27 1999-10-18 株式会社日立製作所 エネルギービームの加工方法およびその装置
JP3518079B2 (ja) * 1995-07-20 2004-04-12 株式会社デンソー レーザ加工方法
DE19831340C1 (de) * 1998-07-13 2000-03-02 Siemens Ag Verfahren und Anordnung zum Kalibrieren einer Laserbearbeitungsmaschine zum Bearbeiten von Werkstücken
JP4872186B2 (ja) * 2004-04-30 2012-02-08 三星ダイヤモンド工業株式会社 レーザ加工装置におけるアライメント方法、およびアライメントプログラム
JP4704851B2 (ja) * 2005-08-18 2011-06-22 鹿島建設株式会社 クレーンの基礎免震受け梁構造
JP2008032524A (ja) * 2006-07-28 2008-02-14 National Institute Of Advanced Industrial & Technology レーザ加工装置および計測用レーザ光の焦点検出方法
JP5645585B2 (ja) * 2010-10-12 2014-12-24 株式会社ディスコ 光デバイスユニットの分割方法
JP6774626B2 (ja) * 2016-10-31 2020-10-28 日立金属株式会社 気密封止用リッドの製造方法
CN111661589B (zh) * 2019-03-05 2022-05-03 大族激光科技产业集团股份有限公司 一种基于图像定位的运动平台校正方法及装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933477B2 (ja) * 1981-07-08 1984-08-16 工業技術院長 レ−ザ加工装置
JPS59141392A (ja) * 1983-02-02 1984-08-14 Toyota Motor Corp ビ−ム溶接装置のスポツト位置調節装置

Also Published As

Publication number Publication date
JPS61206584A (ja) 1986-09-12

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