JPH057819B2 - - Google Patents

Info

Publication number
JPH057819B2
JPH057819B2 JP58153285A JP15328583A JPH057819B2 JP H057819 B2 JPH057819 B2 JP H057819B2 JP 58153285 A JP58153285 A JP 58153285A JP 15328583 A JP15328583 A JP 15328583A JP H057819 B2 JPH057819 B2 JP H057819B2
Authority
JP
Japan
Prior art keywords
electron
detector
secondary electrons
electron beam
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58153285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6047358A (ja
Inventor
Katsuhiro Kuroda
Hideo Todokoro
Shozo Yoneda
Naotake Saito
Tadashi Ootaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58153285A priority Critical patent/JPS6047358A/ja
Publication of JPS6047358A publication Critical patent/JPS6047358A/ja
Publication of JPH057819B2 publication Critical patent/JPH057819B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58153285A 1983-08-24 1983-08-24 電子線装置 Granted JPS6047358A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58153285A JPS6047358A (ja) 1983-08-24 1983-08-24 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58153285A JPS6047358A (ja) 1983-08-24 1983-08-24 電子線装置

Publications (2)

Publication Number Publication Date
JPS6047358A JPS6047358A (ja) 1985-03-14
JPH057819B2 true JPH057819B2 (enrdf_load_stackoverflow) 1993-01-29

Family

ID=15559127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58153285A Granted JPS6047358A (ja) 1983-08-24 1983-08-24 電子線装置

Country Status (1)

Country Link
JP (1) JPS6047358A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212953A (ja) * 1984-04-06 1985-10-25 Hitachi Ltd 電子線装置
GB8604181D0 (en) * 1986-02-20 1986-03-26 Texas Instruments Ltd Electron beam apparatus
JP2918554B2 (ja) * 1988-04-08 1999-07-12 株式会社日立製作所 荷電粒子線用電界磁界形分離器

Also Published As

Publication number Publication date
JPS6047358A (ja) 1985-03-14

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