JPH0578168B2 - - Google Patents

Info

Publication number
JPH0578168B2
JPH0578168B2 JP59039510A JP3951084A JPH0578168B2 JP H0578168 B2 JPH0578168 B2 JP H0578168B2 JP 59039510 A JP59039510 A JP 59039510A JP 3951084 A JP3951084 A JP 3951084A JP H0578168 B2 JPH0578168 B2 JP H0578168B2
Authority
JP
Japan
Prior art keywords
lighting
frequency
electron beam
light
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59039510A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60183728A (ja
Inventor
Mitsuo Tabata
Ichiro Mori
Toshiaki Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3951084A priority Critical patent/JPS60183728A/ja
Publication of JPS60183728A publication Critical patent/JPS60183728A/ja
Publication of JPH0578168B2 publication Critical patent/JPH0578168B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
JP3951084A 1984-03-01 1984-03-01 電子ビ−ム転写用位置合わせ方法 Granted JPS60183728A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3951084A JPS60183728A (ja) 1984-03-01 1984-03-01 電子ビ−ム転写用位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3951084A JPS60183728A (ja) 1984-03-01 1984-03-01 電子ビ−ム転写用位置合わせ方法

Publications (2)

Publication Number Publication Date
JPS60183728A JPS60183728A (ja) 1985-09-19
JPH0578168B2 true JPH0578168B2 (enExample) 1993-10-28

Family

ID=12555033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3951084A Granted JPS60183728A (ja) 1984-03-01 1984-03-01 電子ビ−ム転写用位置合わせ方法

Country Status (1)

Country Link
JP (1) JPS60183728A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785232A (en) * 1980-11-17 1982-05-27 Fujitsu Ltd Positional matching

Also Published As

Publication number Publication date
JPS60183728A (ja) 1985-09-19

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