JPH0576784B2 - - Google Patents
Info
- Publication number
- JPH0576784B2 JPH0576784B2 JP59125149A JP12514984A JPH0576784B2 JP H0576784 B2 JPH0576784 B2 JP H0576784B2 JP 59125149 A JP59125149 A JP 59125149A JP 12514984 A JP12514984 A JP 12514984A JP H0576784 B2 JPH0576784 B2 JP H0576784B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- insulating film
- groove
- pair
- well region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 13
- 230000003068 static effect Effects 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 18
- 238000009792 diffusion process Methods 0.000 description 15
- 239000004020 conductor Substances 0.000 description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 9
- 230000010354 integration Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Logic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59125149A JPS615569A (ja) | 1984-06-20 | 1984-06-20 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59125149A JPS615569A (ja) | 1984-06-20 | 1984-06-20 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS615569A JPS615569A (ja) | 1986-01-11 |
| JPH0576784B2 true JPH0576784B2 (cs) | 1993-10-25 |
Family
ID=14903077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59125149A Granted JPS615569A (ja) | 1984-06-20 | 1984-06-20 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS615569A (cs) |
-
1984
- 1984-06-20 JP JP59125149A patent/JPS615569A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS615569A (ja) | 1986-01-11 |
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