JPH0576129B2 - - Google Patents

Info

Publication number
JPH0576129B2
JPH0576129B2 JP61311802A JP31180286A JPH0576129B2 JP H0576129 B2 JPH0576129 B2 JP H0576129B2 JP 61311802 A JP61311802 A JP 61311802A JP 31180286 A JP31180286 A JP 31180286A JP H0576129 B2 JPH0576129 B2 JP H0576129B2
Authority
JP
Japan
Prior art keywords
electron beam
converging lens
lens
converging
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61311802A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63276856A (ja
Inventor
Eitaro Enokido
Hiroshi Sawaragi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61311802A priority Critical patent/JPS63276856A/ja
Publication of JPS63276856A publication Critical patent/JPS63276856A/ja
Publication of JPH0576129B2 publication Critical patent/JPH0576129B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP61311802A 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置 Granted JPS63276856A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61311802A JPS63276856A (ja) 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61311802A JPS63276856A (ja) 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置

Publications (2)

Publication Number Publication Date
JPS63276856A JPS63276856A (ja) 1988-11-15
JPH0576129B2 true JPH0576129B2 (enrdf_load_stackoverflow) 1993-10-22

Family

ID=18021608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61311802A Granted JPS63276856A (ja) 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置

Country Status (1)

Country Link
JP (1) JPS63276856A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08138600A (ja) * 1994-11-04 1996-05-31 Shimadzu Corp 荷電粒子光学系
JP2006059513A (ja) 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置
JP6344078B2 (ja) * 2014-06-19 2018-06-20 株式会社島津製作所 電子ビーム装置並びに電子ビーム装置の制御装置及び制御方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531986B2 (enrdf_load_stackoverflow) * 1973-01-19 1980-08-22
JPS58146344U (ja) * 1982-03-26 1983-10-01 日本電子株式会社 荷電粒子源

Also Published As

Publication number Publication date
JPS63276856A (ja) 1988-11-15

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